Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6758223 | Plasma RIE polymer removal | Andy Cowley, Timothy Allen Dalton, Christopher V. Jahnes | 2004-07-06 |
| 6488778 | Apparatus and method for controlling wafer environment between thermal clean and thermal processing | Arne Ballantine, Walter Frey, Michael J. Gambero, Neena Garg, Byeongju Park +1 more | 2002-12-03 |
| 6387754 | Method of forming an on-chip decoupling capacitor with bottom hardmask | Timothy J. Dalton, Andrew P. Cowley, Erdem Kaltalioglu, Vincent J. McGahay | 2002-05-14 |
| 6278147 | On-chip decoupling capacitor with bottom hardmask | Timothy J. Dalton, Andrew P. Cowley, Erdem Kaltalioglu, Vincent J. McGahay | 2001-08-21 |
| 6268621 | Vertical channel field effect transistor | Byeongju Park | 2001-07-31 |
| 6178660 | Pass-through semiconductor wafer processing tool and process for gas treating a moving semiconductor wafer | Byeongju Park | 2001-01-30 |