Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7786007 | Method and apparatus of stress relief in semiconductor structures | Mark Hoinkis, Matthias Hierlemann, Gerald Friese, Dennis J. Warner, Erdem Kaltalioglu | 2010-08-31 |
| 7368804 | Method and apparatus of stress relief in semiconductor structures | Mark Hoinkis, Matthias Hierlemann, Gerald Friese, Dennis J. Warner, Erdem Kaltalioglu | 2008-05-06 |
| 7241681 | Bilayered metal hardmasks for use in dual damascene etch schemes | Kaushik A. Kumar, Lawrence A. Clevenger, Timothy J. Dalton, Douglas C. La Tulipe, Jr., Erdem Kaltalioglu +5 more | 2007-07-10 |
| 7125792 | Dual damascene structure and method | Kaushik A. Kumar, Douglas C. La Tulipe, Jr., Timothy J. Dalton, Larry Clevenger, Erdem Kaltalioglu +1 more | 2006-10-24 |
| 7091612 | Dual damascene structure and method | Kaushik A. Kumar, Timothy J. Dalton, Larry Clevenger, Douglas C. La Tulipe, Jr., Mark Hoinkis +5 more | 2006-08-15 |
| 7060619 | Reduction of the shear stress in copper via's in organic interlayer dielectric material | Erdem Kaltalioglu, Mark Hoinkis, Michael Stetter | 2006-06-13 |
| 7052621 | Bilayered metal hardmasks for use in Dual Damascene etch schemes | Kaushik A. Kumar, Lawrence A. Clevenger, Timothy J. Dalton, Douglas C. La Tulipe, Jr., Erdem Kaltalioglu +5 more | 2006-05-30 |
| 7041574 | Composite intermetal dielectric structure including low-k dielectric material | Sun-Oo Kim, Markus Naujok | 2006-05-09 |
| 6872648 | Reduced splattering of unpassivated laser fuses | Gerald Friese, Mohammed Fazil Fayaz, William T. Motsiff | 2005-03-29 |
| 6864171 | Via density rules | Mark Hoinkis, Matthias Hierlemann, Mohammed Fazil Fayaz, Erdum Kaltalioglu | 2005-03-08 |
| 6806579 | Robust via structure and method | Michael Stetter, Erdem Kaltalioglu | 2004-10-19 |
| 6784105 | Simultaneous native oxide removal and metal neutral deposition method | Chih-Chao Yang, Yun-Yu Wang, Larry Clevenger, Andrew H. Simon, Stephen E. Greco +3 more | 2004-08-31 |
| 6758223 | Plasma RIE polymer removal | Peter A. Emmi, Timothy Allen Dalton, Christopher V. Jahnes | 2004-07-06 |
| 6638851 | Dual hardmask single damascene integration scheme in an organic low k ILD | Erdem Kaltalioglu, Michael Stetter | 2003-10-28 |