Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6488778 | Apparatus and method for controlling wafer environment between thermal clean and thermal processing | Arne Ballantine, Peter A. Emmi, Michael J. Gambero, Neena Garg, Byeongju Park +1 more | 2002-12-03 |
| 4315416 | Bath container for a refrigeration equipment | Rolf Kaiser | 1982-02-16 |