| 9052612 |
Support structure, lithographic apparatus and method |
Marcus Martinus Petrus Adrianus Vermeulen, Johannes Henricus Wilhelmus Jacobs |
2015-06-09 |
| 9013682 |
Clamping device and object loading method |
Rene Theodorus Petrus Compen, Johannes Henricus Wilhelmus Jacobs, Martinus Hendrikus Antonius Leenders, Martin Frans Pierre Smeets |
2015-04-21 |
| 8994917 |
Temperature stabilization system to stabilize a temperature of an article |
Johannes Henricus Wilhelmus Jacobs |
2015-03-31 |
| 8953142 |
Lithographic apparatus, drying device, metrology apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Nicolaas Ten Kate, Marcel Beckers, Marco Polizzi, Michel Riepen +4 more |
2015-02-10 |
| 8947631 |
Lithographic apparatus and device manufacturing method |
Koen Jacobus Johannes Maria Zaal |
2015-02-03 |
| 8941810 |
Lithographic apparatus and device manufacturing method |
Koen Jacobus Johannes Maria Zaal |
2015-01-27 |
| 8913228 |
Lithographic apparatus and device manufacturing method |
Maurice Willem Jozef Etiënne Wijckmans, Martinus Agnes Willem Cuijpers, Martinus Hendrikus Antonius Leenders, Frits Van Der Meulen, Theodorus Petrus Maria Cadee +7 more |
2014-12-16 |
| 8902399 |
Lithographic apparatus, cleaning system and cleaning method for in situ removing contamination from a component in a lithographic apparatus |
Rene Theodorus Petrus Compen |
2014-12-02 |
| 8786823 |
Lithographic apparatus and device manufacturing method |
Martinus Hendrikus Antonius Leenders, Nicolaas Rudolf Kemper |
2014-07-22 |
| 8743339 |
Lithographic apparatus and device manufacturing method |
Koen Jacobus Johannes Maria Zaal |
2014-06-03 |
| 8705009 |
Heat pipe, lithographic apparatus and device manufacturing method |
Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Gerrit Van Donk, Johannes Van Es |
2014-04-22 |
| 8570492 |
Lithographic apparatus |
Engelbertus Antonius Fransiscus Van Der Pasch, Emiel Jozef Melanie Eussen, Johannes Henricus Wilhelmus Jacobs, Frank Staals, Lukasz Jerzy Macht +2 more |
2013-10-29 |
| 8564763 |
Lithographic apparatus and method |
Johannes Henricus Wilhelmus Jacobs, Martinus Hendrikus Antonius Leenders, Frits Van Der Meulen, Anko Jozef Cornelus Sijben, Wouterus Johannes Petrus Maria Maas +3 more |
2013-10-22 |
| 8514365 |
Lithographic apparatus and device manufacturing method |
Frederik Eduard De Jong, Marcel Hendrikus Maria Beems, Marinus Aart Van Den Brink, Johannes Henricus Wilhelmus Jacobs, Martinus Hendrikus Antonius Leenders +10 more |
2013-08-20 |
| 8482845 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more |
2013-07-09 |
| 8476167 |
Lithographic apparatus and method of manufacturing an electrostatic clamp for a lithographic apparatus |
Hubert Adriaan Van Mierlo, Erik Ham, Hendricus Johannes Maria Meijer, Hendrik Antony Johannes Neerhof, Johannes Adrianus Petrus Leijtens +3 more |
2013-07-02 |
| 8446563 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +12 more |
2013-05-21 |
| 8421996 |
Lithographic apparatus |
Martinus Hendrikus Antonius Leenders, Nicolaas Ten Kate, Marcel Beckers, Johannes Petrus Maria Smeulers, Michel Riepen +2 more |
2013-04-16 |
| 8384881 |
Lithographic apparatus, stage apparatus and device manufacturing method |
Dirk-Jan Bijvoet, Gerbrand Van Der Zouw, Frederik Eduard De Jong |
2013-02-26 |
| 8269949 |
Lithographic apparatus and device manufacturing method |
Marcus Martinus Petrus Adrianus Vermeulen, Andre Bernardus Jeunink, Erik Roelof Loopstra, Rene Theodorus Petrus Compen, Peter Smits +4 more |
2012-09-18 |
| 8232540 |
Lithographic apparatus and substrate edge seal |
Johannes Henricus Wilhelmus Jacobs, Nicolaas Rudolf Kemper, Martinus Hendrikus Antonius Leenders |
2012-07-31 |
| 8154708 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +16 more |
2012-04-10 |
| 8027019 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Sjoerd Nicolaas Lambertus Donders, Edwin Cornelis Kadijk, Sergei Shulepov |
2011-09-27 |
| 8003968 |
Lithographic apparatus and substrate edge seal |
Johannes Henricus Wilhelmus Jacobs, Nicolaas Rudolf Kemper, Martinus Hendrikus Antonius Leenders |
2011-08-23 |
| 7978306 |
Lithographic apparatus and device manufacturing method |
Noud Jan Gilissen, Martinus Hendrikus Antonius Leenders |
2011-07-12 |