| 7864292 |
Lithographic apparatus and device manufacturing method |
Martinus Hendrikus Antonius Leenders, Nicolaas Rudolf Kemper |
2011-01-04 |
| 7804575 |
Lithographic apparatus and device manufacturing method having liquid evaporation control |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Vermeer +20 more |
2010-09-28 |
| 7804577 |
Lithographic apparatus |
Martinus Hendrikus Antonius Leenders, Nicolaas Ten Kate, Nicolaas Rudolf Kemper, Marcel Beckers, Johannes Petrus Maria Smeulers +2 more |
2010-09-28 |
| 7804582 |
Lithographic apparatus, method of calibrating a lithographic apparatus and device manufacturing method |
Koen Jacobus Johannes Maria Zaal, Judocus Marie Dominicus Stoeldraijer, Antonius Johannes De Kort, Franciscus Van De Mast, Marteijn De Jong |
2010-09-28 |
| 7791709 |
Substrate support and lithographic process |
Pieter Renaat Maria Hennus, Frits Van Der Meulen, Peter Paul Steijaert, Hubert Matthieu Richard Steijns, Peter Smits |
2010-09-07 |
| 7751027 |
Lithographic apparatus and device manufacturing method |
Johannes Henricus Wilhelmus Jacobs, Igor Petrus Maria Bouchoms, Nicolaas Ten Kate, Nicolaas Rudolf Kemper, Martinus Hendrikus Antonius Leenders +6 more |
2010-07-06 |
| 7746447 |
Lithographic apparatus, device manufacturing method and method of calibrating a lithographic apparatus |
Koen Jacobus Johannes Maria Zaal, Johannes Henricus Wilhelmus Jacobs, Erik Roelof Loopstra, Frederik Eduard De Jong |
2010-06-29 |
| 7656501 |
Lithographic apparatus |
Nicolaas Ten Kate, Nicolaas Rudolf Kemper, Martinus Hendrikus Antonius Leenders, Johannes Petrus Maria Smeulers |
2010-02-02 |
| 7639345 |
Lithographic apparatus |
Aschwin Lodewijk Hendricus Johannes Van Meer, Wim Tjibbo Tel, Jacob Willem Vink, Rene Theodorus Petrus Compen, Petrus Johannes Gerrits |
2009-12-29 |
| 7630060 |
Device manufacturing method, lithographic apparatus and device manufactured thereby |
Levinus Pieter Bakker, Wilhelmus Josephus Box, Jan Van Elp, Frank Jeroen Pieter Schuurmans, Jan Evert Van Der Werf |
2009-12-08 |
| 7602470 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christian Alexander Hoogendam +12 more |
2009-10-13 |
| 7595496 |
Optimized correction of wafer thermal deformations in a lithographic process |
Harmen Klaas Van Der Schoot, Jeroen Pieter Starreveld, Wouterus Johannes Petrus Maria Maas, Willem Jurrianus Venema, Boris Menchtchikov |
2009-09-29 |
| 7593096 |
Lithographic apparatus and device manufacturing method |
Erik Roelof Loopstra |
2009-09-22 |
| 7564536 |
Lithographic apparatus and device manufacturing method |
Marcus Boonman, Thomas Josephus Maria Castenmiller, Andre Bernardus Jeunink |
2009-07-21 |
| 7532310 |
Apparatus, method for supporting and/or thermally conditioning a substrate, a support table, and a chuck |
Jeroen Johannes Sophia Maria Mertens, Aschwin Lodewijk Hendricus Johannes Van Meer, Edwin Augustinus Matheus Van Gompel |
2009-05-12 |
| 7528935 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
Koen Jacobus Johannes Maria Zaal, Tjarko Adriaan Rudolf Van Empel, Hendricus Johannes Maria Meijer, Marco Le Kluse, Jan Hopman |
2009-05-05 |
| 7453063 |
Calibration substrate and method for calibrating a lithographic apparatus |
Jeroen Johannes Sophia Maria Mertens, Frederick Eduard De Jong, Koen Goorman, Boris Menchtchikov |
2008-11-18 |
| 7420194 |
Lithographic apparatus and substrate edge seal |
Johannes Henricus Wilhelmus Jacobs, Nicolaas Rudolf Kemper, Martinus Hendrikus Antonius Leenders |
2008-09-02 |
| 7411657 |
Lithographic apparatus and device manufacturing method |
Noud Jan Gilissen, Martinus Hendrikus Antonius Leenders, Koen Jacobus Johannes Maria Zaal |
2008-08-12 |
| 7385670 |
Lithographic apparatus, cleaning system and cleaning method for in situ removing contamination from a component in a lithographic apparatus |
Rene Theodorus Petrus Compen |
2008-06-10 |
| 7327438 |
Lithographic apparatus and method of a manufacturing device |
Koen Jacobus Johannes Maria Zaal, Tjarko Adriaan Rudolf Van Empel, Aschwin Lodewijk Hendricus Johannes Van Meer, Jan Rein Miedema |
2008-02-05 |
| 7327439 |
Lithographic apparatus and device manufacturing method |
Koen Jacobus Johannes Maria Zaal, Jan Hopman |
2008-02-05 |
| 7307696 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders |
2007-12-11 |
| 7304715 |
Lithographic apparatus and device manufacturing method |
Theodorus Petrus Maria Cadee, Jeroen Johannes Sophia Maria Mertens, Frederick Eduard De Jong, Koen Goorman, Boris Menchtchikov +6 more |
2007-12-04 |
| 7250237 |
Optimized correction of wafer thermal deformations in a lithographic process |
Harmen Klaas Van Der Schoot, Jeroen Pieter Starreveld, Wouterus Johannes Petrus Maria Maas, Willem Jurrianus Venema, Boris Menchtchikov |
2007-07-31 |