| 10180629 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +16 more |
2019-01-15 |
| 10126664 |
Lithographic apparatus and device manufacturing method |
Martinus Hendrikus Antonius Leenders, Nicolaas Rudolf Kemper |
2018-11-13 |
| 10018925 |
Lithographic apparatus, drying device, metrology apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Nicolaas Ten Kate, Marcel Beckers, Marco Polizzi, Michel Riepen +4 more |
2018-07-10 |
| 9904185 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +12 more |
2018-02-27 |
| 9851644 |
Lithographic apparatus and device manufacturing method |
Koen Jacobus Johannes Maria Zaal |
2017-12-26 |
| 9696638 |
Lithographic apparatus |
Engelbertus Antonius Fransiscus Van Der Pasch, Emiel Jozef Melanie Eussen, Johannes Henricus Wilhelmus Jacobs, William Peter Van Drent, Frank Staals +2 more |
2017-07-04 |
| 9632435 |
Lithographic apparatus and method |
Nicolaas Ten Kate, Johannes Henricus Wilhelmus Jacobs, Bastiaan Andreas Wilhelmus Hubertus Knarren, Thibault Simon Mathieu Laurent, Robbert Jan Voogd +3 more |
2017-04-25 |
| 9618853 |
Lithographic apparatus and device manufacturing method |
Martinus Hendrikus Antonius Leenders, Nicolaas Rudolf Kemper |
2017-04-11 |
| 9606429 |
Lithographic apparatus, drying device, metrology apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Nicolaas Ten Kate, Marcel Beckers, Marco Polizzi, Michel Riepen +4 more |
2017-03-28 |
| 9581916 |
Lithographic apparatus and device manufacturing method |
Noud Jan Gilissen, Martinus Hendrikus Antonius Leenders, Koen Jacobus Johannes Maria Zaal |
2017-02-28 |
| 9541843 |
Lithographic apparatus and device manufacturing method involving a sensor detecting a radiation beam through liquid |
Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more |
2017-01-10 |
| 9507278 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +12 more |
2016-11-29 |
| 9488919 |
Substrate table, a lithographic apparatus and a method involving an encoder plate |
Takeshi Kaneko, Raymond Wilhelmus Louis Lafarre |
2016-11-08 |
| 9436096 |
Lithographic apparatus and device manufacturing method |
Koen Jacobus Johannes Maria Zaal |
2016-09-06 |
| 9268242 |
Lithographic apparatus and device manufacturing method involving a heater and a temperature sensor |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Vermeer +20 more |
2016-02-23 |
| 9268236 |
Lithographic apparatus and device manufacturing method having heat pipe with fluid to cool substrate and/or substrate holder |
Johannes Henricus Wilhelmus Jacobs, Igor Petrus Maria Bouchoms, Nicolaas Rudolf Kemper, Nicolaas Ten Kate, Martinus Hendrikus Antonius Leenders +6 more |
2016-02-23 |
| 9235113 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Sjoerd Nicolaas Lambertus Donders, Edwin Cornelis Kadijk, Sergei Shulepov |
2016-01-12 |
| 9229340 |
Lithographic apparatus |
Engelbertus Antonius Fransiscus Van Der Pasch, Emiel Jozef Melanie Eussen, Johannes Henricus Wilhelmus Jacobs, William Peter Van Drent, Frank Staals +2 more |
2016-01-05 |
| 9188882 |
Lithographic apparatus and device manufacturing method |
Noud Jan Gilissen, Martinus Hendrikus Antonius Leenders, Koen Jacobus Johannes Maria Zaal |
2015-11-17 |
| 9188880 |
Lithographic apparatus and device manufacturing method involving a heater |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Vermeer +20 more |
2015-11-17 |
| 9152058 |
Lithographic apparatus and device manufacturing method involving a member and a fluid opening |
Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more |
2015-10-06 |
| 9140996 |
Lithographic apparatus and device manufacturing method |
Martinus Hendrikus Antonius Leenders, Nicolaas Rudolf Kemper |
2015-09-22 |
| 9097992 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederick De Graaf, Christiaan Alexander Hoogendam +12 more |
2015-08-04 |
| 9081299 |
Lithographic apparatus and device manufacturing method involving removal of liquid entering a gap |
Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more |
2015-07-14 |
| 9052613 |
Displacement device, lithographic apparatus and positioning method |
Johannes Hubertus Antonius Van De Rijdt, Marcus Martinus Petrus Adrianus Vermeulen, Erik Johannes Antonius Manders |
2015-06-09 |