Issued Patents All Time
Showing 101–124 of 124 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7245357 | Lithographic apparatus and device manufacturing method | Erwin John Van Zwet, Jan Van Elp, Johannes Hubertus Josephina Moors, Hendrik Antony Johannes Neerhof, Adrianus Mathijs Maria De Groof +3 more | 2007-07-17 |
| 7239368 | Using unflatness information of the substrate table or mask table for decreasing overlay | Rene Oesterholt, Ralph Brinkhof, Tjarko Adriaan Rudolf Van Empel, Leon Martin Levasier, Koen Jacobus Johannes Maria Zaal +1 more | 2007-07-03 |
| 7227619 | Lithographic apparatus and device manufacturing method | Koen Jacobus Johannes Maria Zaal, Jeroen Johannes Sophia Maria Mertens | 2007-06-05 |
| 7224438 | Method of manufacturing a device, device manufactured thereby, computer program and lithographic apparatus | Marcel Nicolaas Jacobus van Kervinck | 2007-05-29 |
| 7213963 | Lithographic apparatus and device manufacturing method | Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more | 2007-05-08 |
| 7196768 | Lithographic apparatus and device manufacturing method | Jeroen Johannes Sophia Maria Mertens, Frederik Eduard De Jong, Koen Goorman, Boris Menchtchikov, Edwin Augustinus Matheus Van Gompel | 2007-03-27 |
| 7187433 | Electrostatic clamp assembly for a lithographic apparatus | Hendrik Antony Johannes Neerhof, Koen Jacobus Johannes Maria Zaal, Marco Le Kluse | 2007-03-06 |
| 7161662 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Tjarko Adriaan Rudolf Van Empel, Koen Jacobus Johannes Maria Zaal | 2007-01-09 |
| 7133120 | Lithographic apparatus, article support member, and method | Koen Jacobus Johannes Maria Zaal, Aschwin Lodewijk Hendricus Johannes Van Meer | 2006-11-07 |
| 7119885 | Lithographic apparatus and device manufacturing method | Tjarko Adriaan Rudolf Van Empel, Aschwin Lodewijk Hendricus Johannes Van Meer, Jan Rein Miedema, Koen Jacobus Johannes Maria Zaal | 2006-10-10 |
| 7119884 | Lithographic apparatus and device manufacturing method | Noud Jan Gilissen, Jeroen Pieter Starreveld | 2006-10-10 |
| 7110085 | Lithographic apparatus, substrate holder and method of manufacturing | Koen Jacobus Johannes Maria Zaal, Tjarko Adriaan Rudolf Van Empel | 2006-09-19 |
| 7110091 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Koen Jacobus Johannes Maria Zaal, Tjarko Adriaan Rudolf Van Empel, Jan Hopman | 2006-09-19 |
| 7105836 | Method and apparatus for cooling a reticle during lithographic exposure | Santiago del Puerto, Daniel N. Galburt, Andrew W. McCullough, Stephen Roux | 2006-09-12 |
| 7106416 | Lithographic apparatus and device manufacturing method | Wilhelmus Josephus Box, Noud Jan Gilissen | 2006-09-12 |
| 7092231 | Chuck, lithographic apparatus and device manufacturing method | Martinus Hendricus Hoeks | 2006-08-15 |
| 7088431 | Lithographic apparatus and device manufacturing method | Johannes Hubertus Josephina Moors, Peter Theodorus Maria Giesen | 2006-08-08 |
| 7064808 | Substrate carrier and method for making a substrate carrier | Noud Jan Gilissen, Harmen Klaas Van Der Schoot, Petrus Matthijs Henricus Vosters | 2006-06-20 |
| 7041989 | Lithographic apparatus and device manufacturing method | Hendrik Antony Johannes Neerhof, Johannes Hubertus Josephina Moors, Marco Le Kluse | 2006-05-09 |
| 7030967 | Lithographic apparatus, device manufacturing method and substrate holder | Robertus Nicodemus Jacobus Van Ballegoij, Martinus Agnes Willem Cuijpers, Pieter Johannes Gertrudis Meijers, Gerardus Petrus Matthijs Van Nunen | 2006-04-18 |
| 7027132 | Lithographic apparatus and device manufacturing method | Koen Jacobus Johannes Maria Zaal | 2006-04-11 |
| 7019816 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Henrikus Herman Marie Cox, Koen Jacobus Johannes Maria Zaal | 2006-03-28 |
| 7019820 | Lithographic apparatus and device manufacturing method | Koen Jacobus Johannes Maria Zaal | 2006-03-28 |
| 6897945 | Lithographic apparatus and device manufacturing method | Hendrik Anthony Johannes Neerhof, Koen Jacobus Johannes Maria Zaal, Marco Le Kluse | 2005-05-24 |