| 8953144 |
Lithographic apparatus and device manufacturing method |
Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Hans Jansen, Erik Roelof Loopstra, Jeroen Johannes Sophia Maria Mertens +4 more |
2015-02-10 |
| 8902404 |
Lithographic apparatus and device manufacturing method |
Marco Koert Stavenga, Martinus Cornelis Maria Verhagen, Hans Jansen |
2014-12-02 |
| 8823918 |
Lithographic apparatus and a method of operating the apparatus |
Robert Douglas Watso, Youri Johannes Laurentius Maria Van Dommelen, Hans Jansen, Martinus Hendrikus Antonius Leenders, Jeroen Johannes Sophia Maria Mertens +7 more |
2014-09-02 |
| 8780321 |
Lithographic apparatus and device manufacturing method |
Thijs Egidius Johannes Knaapen, Richard Joseph Bruls, Youri Johannes Laurentius Maria Van Dommelen, Martijn Hendrik Kamphuis, Paulus Martinus Maria Liebregts +10 more |
2014-07-15 |
| 8705009 |
Heat pipe, lithographic apparatus and device manufacturing method |
Nicolaas Ten Kate, Joost Jeroen Ottens, Gerrit Van Donk, Johannes Van Es |
2014-04-22 |
| 8675173 |
Lithographic apparatus and device manufacturing method |
Paulus Martinus Maria Liebregts, Tammo Uitterdijk |
2014-03-18 |
| 8629971 |
Lithographic apparatus and device manufacturing method |
Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Hans Jansen, Erik Roelof Loopstra, Jeroen Johannes Sophia Maria Mertens +4 more |
2014-01-14 |
| 8570492 |
Lithographic apparatus |
Engelbertus Antonius Fransiscus Van Der Pasch, Emiel Jozef Melanie Eussen, Joost Jeroen Ottens, Frank Staals, Lukasz Jerzy Macht +2 more |
2013-10-29 |
| 8564763 |
Lithographic apparatus and method |
Martinus Hendrikus Antonius Leenders, Frits Van Der Meulen, Joost Jeroen Ottens, Anko Jozef Cornelus Sijben, Wouterus Johannes Petrus Maria Maas +3 more |
2013-10-22 |
| 8514365 |
Lithographic apparatus and device manufacturing method |
Frederik Eduard De Jong, Marcel Hendrikus Maria Beems, Marinus Aart Van Den Brink, Martinus Hendrikus Antonius Leenders, Leon Martin Levasier +10 more |
2013-08-20 |
| 8472003 |
Fluid handling structure, lithographic apparatus and device manufacturing method |
Hrishikesh Patel, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons, Daniel Jozef Maria Direcks +11 more |
2013-06-25 |
| 8462313 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Jeroen Peter Johannes Bruijstens, Ivo Adam Johannes Thomas, Gerardus Adrianus Antonius Maria Kusters, Marcio Alexandre Cano Miranda +1 more |
2013-06-11 |
| 8259287 |
Lithographic apparatus and device manufacturing method |
Marcel Beckers, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Nicolaas Ten Kate, Nicolaas Rudolf Kemper +2 more |
2012-09-04 |
| 8246838 |
Fluid filtration method, fluid filtered thereby, lithographic apparatus and device manufacturing method |
Martinus Cornelis Maria Verhagen, Roelof Frederik De Graaf, Hans Jansen, Marco Koert Stavenga, Jacobus Johannus Leonardus Hendricus Verspay |
2012-08-21 |
| 8232540 |
Lithographic apparatus and substrate edge seal |
Joost Jeroen Ottens, Nicolaas Rudolf Kemper, Martinus Hendrikus Antonius Leenders |
2012-07-31 |
| 8107053 |
Lithographic apparatus, device manufacturing method and apparatus for de-gassing a liquid |
Martinus Cornelis Maria Verhagen, Roelof Frederik De Graaf, Franciscus Johannes Herman Maria Teunissen, Jurgen Benischek |
2012-01-31 |
| 8045134 |
Lithographic apparatus, control system and device manufacturing method |
Marcus Adrianus Van De Kerkhof, Tammo Uitterdijk, Nicolas Lallemant |
2011-10-25 |
| 8018573 |
Lithographic apparatus and device manufacturing method |
Marco Koert Stavenga, Martinus Cornelis Maria Verhagen, Hans Jansen |
2011-09-13 |
| 8004654 |
Lithographic apparatus and device manufacturing method |
Marcel Beckers, Nicolaas Ten Kate, Ferdy Migchelbrink |
2011-08-23 |
| 8003968 |
Lithographic apparatus and substrate edge seal |
Joost Jeroen Ottens, Nicolaas Rudolf Kemper, Martinus Hendrikus Antonius Leenders |
2011-08-23 |
| 7924403 |
Lithographic apparatus and device and device manufacturing method |
Paulus Martinus Maria Liebregts, Tammo Uitterdijk |
2011-04-12 |
| 7914687 |
Fluid filtration method, fluid filtered thereby, lithographic apparatus and device manufacturing method |
Martinus Cornelis Maria Verhagen, Roelof Frederik De Graaf, Hans Jansen, Marco Koert Stavenga, Jacobus Johannus Leonardus Hendricus Verspay |
2011-03-29 |
| 7804575 |
Lithographic apparatus and device manufacturing method having liquid evaporation control |
Theodorus Petrus Maria Cadee, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Vermeer, Jeroen Johannes Sophia Maria Mertens +20 more |
2010-09-28 |
| 7751027 |
Lithographic apparatus and device manufacturing method |
Igor Petrus Maria Bouchoms, Nicolaas Ten Kate, Nicolaas Rudolf Kemper, Martinus Hendrikus Antonius Leenders, Erik Roelof Loopstra +6 more |
2010-07-06 |
| 7746447 |
Lithographic apparatus, device manufacturing method and method of calibrating a lithographic apparatus |
Koen Jacobus Johannes Maria Zaal, Erik Roelof Loopstra, Joost Jeroen Ottens, Frederik Eduard De Jong |
2010-06-29 |