| 9891541 |
Thermal conditioning unit, lithographic apparatus and device manufacturing method |
Jan Steven Christiaan Westerlaken |
2018-02-13 |
| 9857695 |
Lithographic apparatus and device manufacturing method |
Marcel Beckers, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Nicolaas Ten Kate, Nicolaas Rudolf Kemper +2 more |
2018-01-02 |
| 9785055 |
Object holder and lithographic apparatus |
Thibault Simon Mathieu Laurent, Wilhelmus Franciscus Johannes Simons, Martijn Houben, Raymond Wilhelmus Louis Lafarre, Koen Steffens +8 more |
2017-10-10 |
| 9753382 |
Sensor, lithographic apparatus and device manufacturing method |
Thibault Simon Mathieu Laurent, Haico Victor Kok, Yuri Johannes Gabriël Van De Vijver, Johannes Antonius Maria Van De Wal, Bastiaan Andreas Wilhelmus Hubertus Knarren +6 more |
2017-09-05 |
| 9696638 |
Lithographic apparatus |
Engelbertus Antonius Fransiscus Van Der Pasch, Joost Jeroen Ottens, Emiel Jozef Melanie Eussen, William Peter Van Drent, Frank Staals +2 more |
2017-07-04 |
| 9632435 |
Lithographic apparatus and method |
Nicolaas Ten Kate, Joost Jeroen Ottens, Bastiaan Andreas Wilhelmus Hubertus Knarren, Thibault Simon Mathieu Laurent, Robbert Jan Voogd +3 more |
2017-04-25 |
| 9618858 |
Lithographic apparatus and a device manufacturing method involving thermal conditioning of a table |
Hrishikesh Patel, Gerardus Adrianus Antonius Maria Kusters, Thibault Simon Mathieu Laurent, Marcio Alexandre Cano Miranda, Ruud Hendrikus Martinus Johannes Bloks +2 more |
2017-04-11 |
| 9581914 |
Lithographic apparatus and device manufacturing method |
Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Hans Jansen, Erik Roelof Loopstra, Jeroen Johannes Sophia Maria Mertens +4 more |
2017-02-28 |
| 9507275 |
Support apparatus, lithographic apparatus and device manufacturing method |
Raymond Wilhelmus Louis Lafarre, Adrianus Hendrik Koevoets, Sjoerd Nicolaas Lambertus Donders, Menno Fien, Antonius Franciscus Johannes De Groot +6 more |
2016-11-29 |
| 9482967 |
Lithographic apparatus, control system and device manufacturing method |
Marcus Adrianus Van De Kerkhof, Tammo Uitterdijk, Nicolas Lallemant |
2016-11-01 |
| 9429853 |
Lithographic apparatus and device manufacturing method |
Marcel Beckers, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Nicolaas Ten Kate, Nicolaas Rudolf Kemper +2 more |
2016-08-30 |
| 9280063 |
Substrate table assembly, an immersion lithographic apparatus and a device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Sjoerd Nicolaas Lambertus Donders, Martijn Houben, Thibault Simon Mathieu Laurent, Frank Johannes Jacobus Van Boxtel +1 more |
2016-03-08 |
| 9268242 |
Lithographic apparatus and device manufacturing method involving a heater and a temperature sensor |
Theodorus Petrus Maria Cadee, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Vermeer, Jeroen Johannes Sophia Maria Mertens +20 more |
2016-02-23 |
| 9268236 |
Lithographic apparatus and device manufacturing method having heat pipe with fluid to cool substrate and/or substrate holder |
Igor Petrus Maria Bouchoms, Nicolaas Rudolf Kemper, Nicolaas Ten Kate, Martinus Hendrikus Antonius Leenders, Erik Roelof Loopstra +6 more |
2016-02-23 |
| 9229340 |
Lithographic apparatus |
Engelbertus Antonius Fransiscus Van Der Pasch, Joost Jeroen Ottens, Emiel Jozef Melanie Eussen, William Peter Van Drent, Frank Staals +2 more |
2016-01-05 |
| 9188880 |
Lithographic apparatus and device manufacturing method involving a heater |
Theodorus Petrus Maria Cadee, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Vermeer, Jeroen Johannes Sophia Maria Mertens +20 more |
2015-11-17 |
| 9052612 |
Support structure, lithographic apparatus and method |
Marcus Martinus Petrus Adrianus Vermeulen, Joost Jeroen Ottens |
2015-06-09 |
| 9025127 |
Lithographic apparatus and device manufacturing method |
Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Hans Jansen, Erik Roelof Loopstra, Jeroen Johannes Sophia Maria Mertens +4 more |
2015-05-05 |
| 9013682 |
Clamping device and object loading method |
Rene Theodorus Petrus Compen, Martinus Hendrikus Antonius Leenders, Joost Jeroen Ottens, Martin Frans Pierre Smeets |
2015-04-21 |
| 8994917 |
Temperature stabilization system to stabilize a temperature of an article |
Joost Jeroen Ottens |
2015-03-31 |
| 8988651 |
Lithographic apparatus and device manufacturing method |
Marcel Beckers, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Nicolaas Ten Kate, Nicolaas Rudolf Kemper +2 more |
2015-03-24 |
| 8982316 |
Lithographic apparatus, a metrology apparatus and a method of using the apparatus |
Axel Sebastiaan Lexmond, Sjoerd Nicolaas Lambertus Donders, Leonard Ferdinand Gerard Geers |
2015-03-17 |
| 8976334 |
Lithographic apparatus and device manufacturing method |
Marcel Beckers, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Nicolaas Ten Kate, Nicolaas Rudolf Kemper +2 more |
2015-03-10 |
| 8958051 |
Lithographic apparatus, device manufacturing method and apparatus for de-gassing a liquid |
Martinus Cornelis Maria Verhagen, Roelof Frederick De Graaf, Franciscus Johannes Herman Maria Teunissen, Jurgen Benischek |
2015-02-17 |
| 8958054 |
Lithographic apparatus and device manufacturing method |
Marcel Beckers, Nicolaas Ten Kate, Ferdy Migchelbrink |
2015-02-17 |