| 7733459 |
Lithographic apparatus and device manufacturing method |
Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Hans Jansen, Erik Roelof Loopstra, Jeroen Johannes Sophia Maria Mertens +4 more |
2010-06-08 |
| 7684012 |
Lithographic device, device manufacturing method and device manufactured thereby |
Vadim Yevgenyevich Banine, Barrie Dudley Brewster, Vladimir Vitalevitch Ivanov, Bastiaan Mertens, Johannes Hubertus Josephina Moors +2 more |
2010-03-23 |
| 7652746 |
Lithographic apparatus and device manufacturing method |
Nicolaas Ten Kate, Franciscus Johannes Joseph Janssen |
2010-01-26 |
| 7502095 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
Barrie Dudley Brewster, Robert Gordon Livesey |
2009-03-10 |
| 7428038 |
Lithographic apparatus, device manufacturing method and apparatus for de-gassing a liquid |
Martinus Cornelis Maria Verhagen, Roelof Frederik De Graaf, Franciscus Johannes Herman Maria Teunissen, Jurgen Benischek |
2008-09-23 |
| 7423721 |
Lithographic apparatus |
Antonius Johannes Josephus Van Dijsseldonk, Mustafa Amhaouch, Wilhelmus Josephus Box, Hernes Jacobs, Marius Ravensbergen +3 more |
2008-09-09 |
| 7420194 |
Lithographic apparatus and substrate edge seal |
Joost Jeroen Ottens, Nicolaas Rudolf Kemper, Martinus Hendrikus Antonius Leenders |
2008-09-02 |
| 7411658 |
Lithographic apparatus and device manufacturing method |
Marcel Beckers, Nicolaas Ten Kate, Ferdy Migchelbrink |
2008-08-12 |
| 7411654 |
Lithographic apparatus and device manufacturing method |
Marcel Beckers, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Nicolaas Ten Kate, Nicolaas Rudolf Kemper +2 more |
2008-08-12 |
| 7378025 |
Fluid filtration method, fluid filtered thereby, lithographic apparatus and device manufacturing method |
Martinus Cornelis Maria Verhagen, Roelof Frederik De Graaf, Hans Jansen, Marco Koert Stavenga, Jacobus Johannus Leonardus Hendricus Verspay |
2008-05-27 |
| 7361911 |
Lithographic apparatus and device manufacturing method |
Johannes Hubertus Josephina Moors, Robertus Nicodemus Jacobus Van Ballegoij, Vadim Yevgenyevich Banine, Gert-Jan Heerens, Frederik T. E. Heuts +2 more |
2008-04-22 |
| 7274431 |
Lithographic projection apparatus and device manufacturing method |
Wilhelmus Josephus Box, Paulus Martinus Maria Liebregts, Thijs Harink |
2007-09-25 |
| 7256863 |
Sealing assembly, a lithographic projection apparatus, and a device manufacturing method |
Barrie Dudley Brewster, Robert Gordon Livesey |
2007-08-14 |
| 7251013 |
Lithographic apparatus and device manufacturing method |
Nicolaas Ten Kate |
2007-07-31 |
| 7133114 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Nicolaas Ten Kate, Frits Van Der Meulen |
2006-11-07 |
| 7126664 |
Lithographic apparatus and a device manufacturing method |
Bernardus Antonius Johannes Luttikhuis, Petrus Rutgerus Bartray, Thijs Harink, Paulus Martinus Maria Liebregts |
2006-10-24 |