Issued Patents All Time
Showing 26–50 of 121 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10131994 | Inductively coupled plasma source with top coil over a ceiling and an independent side coil and independent air flow | Andrew Nguyen, Kenneth S. Collins, Kartik Ramaswamy, Shahid Rauf, James D. Carducci +5 more | 2018-11-20 |
| 10096494 | Substrate support with symmetrical feed structure | Xing Lin, Xiaoping Zhou, Andrew Nguyen, Anchel Sheyner | 2018-10-09 |
| 10096466 | Pulsed plasma for film deposition | Jun Xue, Ludovic Godet, Srinivas D. Nemani, Michael W. Stowell, Qiwei Liang | 2018-10-09 |
| 9991148 | Electrostatic chuck having thermally isolated zones with minimal crosstalk | Vijay D. Parkhe, Konstantin Makhratchev, Jason C. Della Rosa, Hamid Noorbakhsh, Brad L. Mays | 2018-06-05 |
| 9916967 | Fast response fluid control system | — | 2018-03-13 |
| 9896769 | Inductively coupled plasma source with multiple dielectric windows and window-supporting structure | Andrew Nguyen, Kenneth S. Collins, Kartik Ramaswamy, Shahid Rauf, James D. Carducci +5 more | 2018-02-20 |
| 9829790 | Immersion field guided exposure and post-exposure bake process | Sang Ki Nam, Viachslav Babayan, Christine Y Ouyang, Ludovic Godet, Srinivas D. Nemani | 2017-11-28 |
| 9745663 | Symmetrical inductively coupled plasma source with symmetrical flow chamber | Andrew Nguyen, Kenneth S. Collins, Kartik Ramaswamy, Shahid Rauf, James D. Carducci +5 more | 2017-08-29 |
| 9741546 | Symmetric plasma process chamber | James D. Carducci, Hamid Tavassoli, Ajit Balakrishna, Zhigang Chen, Andrew Nguyen +3 more | 2017-08-22 |
| 9666466 | Electrostatic chuck having thermally isolated zones with minimal crosstalk | Vijay D. Parkhe, Konstantin Makhratchev, Jason C. Della Rosa, Hamid Noorbakhsh, Brad L. Mays | 2017-05-30 |
| 9570275 | Heated showerhead assembly | James D. Carducci, Olga Regelman, Kallol Bera, Paul Brillhart | 2017-02-14 |
| 9358702 | Temperature management of aluminium nitride electrostatic chuck | Sumanth Banda, Jennifer Y. Sun, Shane C. Nevil | 2016-06-07 |
| 9338871 | Feedforward temperature control for plasma processing apparatus | Chetan Mahadeswaraswamy, Walter R. Merry, Sergio Fukuda Shoji, Chunlei Zhang, Yashaswini B. Pattar +7 more | 2016-05-10 |
| 9267742 | Apparatus for controlling the temperature uniformity of a substrate | Kallol Bera, Xiaoping Zhou, Andrew Nguyen, Hamid Tavassoli, Surajit Kumar +1 more | 2016-02-23 |
| 9248509 | Multi-zoned plasma processing electrostatic chuck with improved temperature uniformity | Hamid Tavassoli, Surajit Kumar, Kallol Bera, Xiaoping Zhou, Shane C. Nevil | 2016-02-02 |
| 9214315 | Temperature control in plasma processing apparatus using pulsed heat transfer fluid flow | Fernando Silveira, Hamid Tavassoli, Xiaoping Zhou, Shane C. Nevil, Brad L. Mays +5 more | 2015-12-15 |
| 9123762 | Substrate support with symmetrical feed structure | Xing Lin, Xiaoping Zhou, Andrew Nguyen, Anchel Sheyner | 2015-09-01 |
| 8980044 | Plasma reactor with a multiple zone thermal control feed forward control apparatus | Paul Brillhart, Richard Fovell, Hamid Tavassoli, Douglas H. Burns, Kallol Bera +5 more | 2015-03-17 |
| 8937800 | Electrostatic chuck with advanced RF and temperature uniformity | Dmitry Lubomirsky, Jennifer Y. Sun, Mark Markovsky, Konstantin Makhratchev, Samer Banna | 2015-01-20 |
| 8916793 | Temperature control in plasma processing apparatus using pulsed heat transfer fluid flow | Fernando Silveira, Hamid Tavassoli, Xiaoping Zhou, Shane C. Nevil, Brad L. Mays +5 more | 2014-12-23 |
| 8876024 | Heated showerhead assembly | James D. Carducci, Olga Regelman, Kallol Bera, Paul Brillhart | 2014-11-04 |
| 8822876 | Multi-zoned plasma processing electrostatic chuck with improved temperature uniformity | Hamid Tavassoli, Surajit Kumar, Kallol Bera, Xiaoping Zhou, Shane C. Nevil | 2014-09-02 |
| 8801893 | Method of cooling a wafer support at a uniform temperature in a capacitively coupled plasma reactor | Paul Brillhart, Richard Fovell, Douglas H. Burns, Kallol Bera, Daniel J. Hoffman +4 more | 2014-08-12 |
| 8734664 | Method of differential counter electrode tuning in an RF plasma reactor | Yang Yang, Kartik Ramaswamy, Kenneth S. Collins, Steven Lane, Lawrence Wong +1 more | 2014-05-27 |
| 8633423 | Methods and apparatus for controlling substrate temperature in a process chamber | Xing Lin, Xiaoping Zhou, Valentin N. Todorow, Andrew Nguyen, Anchel Sheyner | 2014-01-21 |