Issued Patents All Time
Showing 76–100 of 121 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7754997 | Apparatus and method to confine plasma and reduce flow resistance in a plasma | Kallol Bera, Yan Ye, James D. Carducci, Daniel J. Hoffman, Steven C. Shannon | 2010-07-13 |
| 7674353 | Apparatus to confine plasma and to enhance flow conductance | Kallol Bera, Daniel J. Hoffman, Yan Ye, Michael Kutney | 2010-03-09 |
| 7649729 | Electrostatic chuck assembly | Paul Brillhart | 2010-01-19 |
| 7618516 | Method and apparatus to confine plasma and to enhance flow conductance | Kallol Bera, Daniel J. Hoffman, Yan Ye, Michael Kutney | 2009-11-17 |
| 7585384 | Apparatus and method to confine plasma and reduce flow resistance in a plasma reactor | Kallol Bera, Yan Ye, James D. Carducci, Daniel J. Hoffman, Steven C. Shannon | 2009-09-08 |
| 7479456 | Gasless high voltage high contact force wafer contact-cooling electrostatic chuck | Daniel J. Hoffman, Kartik Ramaswamy, Andrew Nguyen, Hiorji Hanawa, Kenneth S. Collins +1 more | 2009-01-20 |
| 7432209 | Plasma dielectric etch process including in-situ backside polymer removal for low-dielectric constant material | Gerardo Delgadino, Richard Hagborg | 2008-10-07 |
| 7196283 | Plasma reactor overhead source power electrode with low arcing tendency, cylindrical gas outlets and shaped surface | Daniel J. Hoffman, Olga Regelman, James D. Carducci, Keiji Horioka, Jang-Gyoo Yang | 2007-03-27 |
| 7186943 | MERIE plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression | Daniel J. Hoffman, Yan Ye, Dan Katz, Xiaoye Zhao, Kang-Lie Chiang +2 more | 2007-03-06 |
| 7141757 | Plasma reactor with overhead RF source power electrode having a resonance that is virtually pressure independent | Daniel J. Hoffman, Jang-Gyoo Yang, Douglas H. Burns | 2006-11-28 |
| 7132618 | MERIE plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression | Daniel J. Hoffman, Yan Ye, Dan Katz, Xiaoye Zhao, Kang-Lie Chiang +2 more | 2006-11-07 |
| 7030335 | Plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression | Daniel J. Hoffman, Gerald Yin, Yan Ye, Dan Katz, Xiaoye Zhao +3 more | 2006-04-18 |
| 6900596 | Capacitively coupled plasma reactor with uniform radial distribution of plasma | Jang-Gyoo Yang, Daniel J. Hoffman, James D. Carducci, Matthew L. Miller, Kang-Lie Chiang +2 more | 2005-05-31 |
| 6894245 | Merie plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression | Daniel J. Hoffman, Yan Ye, Dan Katz, Xiaoye Zhao, Kang-Lie Chiang +2 more | 2005-05-17 |
| 6790311 | Plasma reactor having RF power applicator and a dual-purpose window | Kenneth S. Collins, Michael R. Rice, Farahmand Askarinam, Craig A. Roderick | 2004-09-14 |
| 6736931 | Inductively coupled RF plasma reactor and plasma chamber enclosure structure therefor | Kenneth S. Collins, Michael R. Rice, John Trow, Craig A. Roderick | 2004-05-18 |
| 6677712 | Gas distribution plate electrode for a plasma receptor | Dan Katz, Yan Ye, Robert B. Hagen, Xiaoye Zhao, Ananda H. Kumar +3 more | 2004-01-13 |
| 6667577 | Plasma reactor with spoke antenna having a VHF mode with the spokes in phase | Steven C. Shannon, Daniel J. Hoffman, Chunshi Cui, Yan Ye, Gerardo Delgadino +4 more | 2003-12-23 |
| 6652712 | Inductive antenna for a plasma reactor producing reduced fluorine dissociation | Shiang-Bau Wang, Daniel J. Hoffman, Chunshi Cui, Yan Ye, Gerardo Delgadino +3 more | 2003-11-25 |
| 6623596 | Plasma reactor having an inductive antenna coupling power through a parallel plate electrode | Kenneth S. Collins, Michael R. Rice, John Trow, Eric Askarinam, Joshua Chiu-Wing Tsui +2 more | 2003-09-23 |
| 6586886 | Gas distribution plate electrode for a plasma reactor | Dan Katz, Yan Ye, Robert B. Hagen, Xiaoye Zhao, Ananda H. Kumar +3 more | 2003-07-01 |
| 6524432 | Parallel-plate electrode plasma reactor having an inductive antenna and adjustable radial distribution of plasma ion density | Kenneth S. Collins, Michael R. Rice, John Trow, Eric Askarinam, Joshua Chiu-Wing Tsui +2 more | 2003-02-25 |
| 6514376 | Thermal control apparatus for inductively coupled RF plasma reactor having an overhead solenoidal antenna | Kenneth S. Collins, Michael R. Rice, Eric Askarinam, Craig A. Roderick | 2003-02-04 |
| 6454898 | Inductively coupled RF Plasma reactor having an overhead solenoidal antenna and modular confinement magnet liners | Kenneth S. Collins, Michael R. Rice, Craig A. Roderick, Eric Askarinam, Gerhard Schneider +5 more | 2002-09-24 |
| 6444085 | Inductively coupled RF plasma reactor having an antenna adjacent a window electrode | Kenneth S. Collins, Michael R. Rice, John Trow, Craig A. Roderick | 2002-09-03 |