Issued Patents All Time
Showing 101–121 of 121 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6440866 | Plasma reactor with heated source of a polymer-hardening precursor material | Kenneth S. Collins, Michael R. Rice, David W. Groechel, Gerald Yin, Jon Mohn +5 more | 2002-08-27 |
| 6365063 | Plasma reactor having a dual mode RF power application | Kenneth S. Collins, Michael R. Rice, Farahmand Askarinam, Craig A. Roderick | 2002-04-02 |
| 6252354 | RF tuning method for an RF plasma reactor using frequency servoing and power, voltage, current or DI/DT control | Kenneth S. Collins, Craig A. Roderick, John Trow, Viktor Shel | 2001-06-26 |
| 6218312 | Plasma reactor with heated source of a polymer-hardening precursor material | Kenneth S. Collins, Michael R. Rice, David W. Groechel, Gerald Yin, Jon Mohn +5 more | 2001-04-17 |
| 6165311 | Inductively coupled RF plasma reactor having an overhead solenoidal antenna | Kenneth S. Collins, Michael R. Rice, John Trow, Craig A. Roderick | 2000-12-26 |
| 6077384 | Plasma reactor having an inductive antenna coupling power through a parallel plate electrode | Kenneth S. Collins, Michael R. Rice, John Trow, Eric Askarinam, Joshua Chiu-Wing Tsui +2 more | 2000-06-20 |
| 6074512 | Inductively coupled RF plasma reactor having an overhead solenoidal antenna and modular confinement magnet liners | Kenneth S. Collins, Michael R. Rice, Craig A. Roderick, Eric Askarinam, Gerhard Schneider +5 more | 2000-06-13 |
| 6063233 | Thermal control apparatus for inductively coupled RF plasma reactor having an overhead solenoidal antenna | Kenneth S. Collins, Michael R. Rice, Eric Askarinam, Craig A. Roderick | 2000-05-16 |
| 6054013 | Parallel plate electrode plasma reactor having an inductive antenna and adjustable radial distribution of plasma ion density | Kenneth S. Collins, Michael R. Rice, John Trow, Eric Askarinam, Joshua Chiu-Wing Tsui +2 more | 2000-04-25 |
| 6036877 | Plasma reactor with heated source of a polymer-hardening precursor material | Kenneth S. Collins, Michael R. Rice, David W. Groechel, Gerald Yin, Jon Mohn +5 more | 2000-03-14 |
| 6024826 | Plasma reactor with heated source of a polymer-hardening precursor material | Kenneth S. Collins, Michael R. Rice, David W. Groechel, Gerald Yin, Jon Mohn +5 more | 2000-02-15 |
| 5990017 | Plasma reactor with heated source of a polymer-hardening precursor material | Kenneth S. Collins, Michael R. Rice, David W. Groechel, Gerald Yin, Jon Mohn +5 more | 1999-11-23 |
| 5916689 | Electrostatic chuck with an impregnated, porous layer that exhibits the Johnson-Rahbeck effect | Kenneth S. Collins, Joshua Tsui | 1999-06-29 |
| 5874361 | Method of processing a wafer within a reaction chamber | Kenneth S. Collins | 1999-02-23 |
| 5800871 | Electrostatic chuck with polymeric impregnation and method of making | Kenneth S. Collins, Joshua Chiu-Wing Tsui | 1998-09-01 |
| 5792562 | Electrostatic chuck with polymeric impregnation and method of making | Kenneth S. Collins, Joshua Chiu-Wing Tsui | 1998-08-11 |
| 5684669 | Method for dechucking a workpiece from an electrostatic chuck | Kenneth S. Collins | 1997-11-04 |
| 5574410 | Electronically tuned matching networks using adjustable inductance elements and resonant tank circuits | Kenneth S. Collins, John Trow, Craig A. Roderick, Jay D. Pinson, II, Robert HARTLAGE +1 more | 1996-11-12 |
| 5572170 | Electronically tuned matching networks using adjustable inductance elements and resonant tank circuits | Kenneth S. Collins, John Trow, Craig A. Roderick, Jay D. Pinson, II, Robert HARTLAGE +1 more | 1996-11-05 |
| 5392018 | Electronically tuned matching networks using adjustable inductance elements and resonant tank circuits | Kenneth S. Collins, John Trow, Craig A. Roderick, Jay D. Pinson, II, Robert HARTLAGE +1 more | 1995-02-21 |
| 5187454 | Electronically tuned matching network using predictor-corrector control system | Kenneth S. Collins, John Trow, Craig A. Roderick, Jay D. Pinson, II | 1993-02-16 |