Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5916689 | Electrostatic chuck with an impregnated, porous layer that exhibits the Johnson-Rahbeck effect | Kenneth S. Collins, Douglas A. Buchberger, Jr. | 1999-06-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5916689 | Electrostatic chuck with an impregnated, porous layer that exhibits the Johnson-Rahbeck effect | Kenneth S. Collins, Douglas A. Buchberger, Jr. | 1999-06-29 |