Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10904996 | Substrate support with electrically floating power supply | Travis Koh, Haitao Wang, Philip Allan Kraus, Vijay D. Parkhe, Daniel Distaso +2 more | 2021-01-26 |
| 8937800 | Electrostatic chuck with advanced RF and temperature uniformity | Dmitry Lubomirsky, Jennifer Y. Sun, Konstantin Makhratchev, Douglas A. Buchberger, Jr., Samer Banna | 2015-01-20 |