Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 10904996 | Substrate support with electrically floating power supply | Travis Koh, Haitao Wang, Philip Allan Kraus, Vijay D. Parkhe, Daniel Distaso +2 more | 2021-01-26 | $35,448,000 |
| 8937800 | Electrostatic chuck with advanced RF and temperature uniformity | Dmitry Lubomirsky, Jennifer Y. Sun, Konstantin Makhratchev, Douglas A. Buchberger, Jr., Samer Banna | 2015-01-20 | $39,758,000 |