Issued Patents All Time
Showing 26–50 of 175 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9076661 | Methods for manganese nitride integration | Paul F. Ma, Jennifer Meng Chu Tseng, Annamalai Lakshmanan, Jing Tang | 2015-07-07 |
| 9004006 | Process chamber lid design with built-in plasma source for short lifetime species | Chien-Teh Kao, Hyman Lam, David T. Or, Nicholas R. Denny, Xiaoxiong Yuan | 2015-04-14 |
| 8980761 | Directional SIO2 etch using low-temperature etchant deposition and plasma post-treatment | David T. Or, Joshua Collins | 2015-03-17 |
| 8955547 | Apparatus and method for providing uniform flow of gas | Faruk Gungor, Dien-Yeh Wu, Joseph Yudovsky | 2015-02-17 |
| 8927059 | Deposition of metal films using alane-based precursors | Xinliang Lu, David Thompson, Jeffrey W. Anthis, Seshadri Ganguli, Wei V. Tang +2 more | 2015-01-06 |
| 8895443 | N-metal film deposition with initiation layer | Seshadri Ganguli, Xinliang Lu, Atif Noori, Maitreyee Mahajani, Shih Chung Chen | 2014-11-25 |
| 8846163 | Method for removing oxides | Chien-Teh Kao, Jing-Pei (Connie) Chou, Chiukin (Steven) Lai, Sal Umotoy, Joel M. Huston +6 more | 2014-09-30 |
| 8815724 | Process for forming cobalt-containing materials | Seshadri Ganguli, Schubert S. Chu, Sang Ho Yu, Kevin Moraes, See-Eng Phan | 2014-08-26 |
| 8747686 | Methods of end point detection for substrate fabrication processes | Bo Zheng, Arvind Sundarrajan | 2014-06-10 |
| 8721796 | Plasma cleaning apparatus and method | Martin Deehan, Matt Cheng-Hsiung Tsai, Nan Lu, David T. Or | 2014-05-13 |
| 8642473 | Methods for contact clean | Linh Thanh, Bo Zheng, Arvind Sundarrajan, John C. Forster, Umesh M. Kellkar +1 more | 2014-02-04 |
| 8633115 | Methods for atomic layer etching | Joseph Yudovsky | 2014-01-21 |
| 8592305 | Doping aluminum in tantalum silicide | Xinliang Lu, Seshadri Ganguli, Shih Chung Chen, Atif Noori, Maitreyee Mahajani | 2013-11-26 |
| 8563424 | Process for forming cobalt and cobalt silicide materials in tungsten contact applications | Seshadri Ganguli, Sang Ho Yu, See-Eng Phan, Amit Khandelwal, Hyoung-Chan Ha | 2013-10-22 |
| 8491967 | In-situ chamber treatment and deposition process | Paul F. Ma, Joseph AuBuchon, Steven H. Kim, Dien-Yeh Wu, Norman Nakashima +2 more | 2013-07-23 |
| 8324095 | Integration of ALD tantalum nitride for copper metallization | Hua Chung, Nirmalya Maity, Jick Yu, Roderick C. Mosely | 2012-12-04 |
| 8318605 | Plasma treatment method for preventing defects in doped silicon oxide surfaces during exposure to atmosphere | Chien-Teh Kao, Haichun Yang, Xinliang Lu | 2012-11-27 |
| 8268684 | Method and apparatus for trench and via profile modification | Chien-Teh Kao, Xinliang Lu, Zhenbin Ge | 2012-09-18 |
| 8252696 | Selective etching of silicon nitride | Xinliang Lu, Haichun Yang, Zhenbin Ge, Nan Lu, David T. Or +1 more | 2012-08-28 |
| 8187970 | Process for forming cobalt and cobalt silicide materials in tungsten contact applications | Seshadri Ganguli, Sang Ho Yu, See-Eng Phan, Amit Khandelwal, Hyoung-Chan Ha | 2012-05-29 |
| 8110489 | Process for forming cobalt-containing materials | Seshadri Ganguli, Schubert S. Chu, Sang Ho Yu, Kevin Moraes, See-Eng Phan | 2012-02-07 |
| 8070879 | Apparatus and method for hybrid chemical processing | Ling Chen, Vincent Ku, Dien-Yeh Wu, Hua Chung | 2011-12-06 |
| 8062422 | Method and apparatus for generating a precursor for a semiconductor processing system | Ling Chen, Vincent Ku, Hua Chung, Christophe Marcadal, Seshadri Ganguli +3 more | 2011-11-22 |
| 8043933 | Integration sequences with top surface profile modification | Chien-Teh Kao, Xinliang Lu, Zhenbin Ge, Hoiman Raymond Hung, Nitin K. Ingle | 2011-10-25 |
| 7994002 | Method and apparatus for trench and via profile modification | Chien-Teh Kao, Xinliang Lu, Zhenbin Ge | 2011-08-09 |