Issued Patents All Time
Showing 151–175 of 251 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9081299 | Lithographic apparatus and device manufacturing method involving removal of liquid entering a gap | Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more | 2015-07-14 |
| 9081302 | Inspection apparatus and method, lithographic apparatus and lithographic processing cell | Laurent Khuat Duy | 2015-07-14 |
| 8994944 | Methods and scatterometers, lithographic systems, and lithographic processing cells | Hugo Augustinus Joseph Cramer, Henricus Johannes Lambertus Megens, Hendrik Jan Hidde Smilde, Adrianus Johannes Hendrikus Schellekens, Michael Kubis | 2015-03-31 |
| 8982329 | Method and apparatus for measuring line end shortening, substrate and patterning device | Maurits Van Der Schaar, Richard Johannes Franciscus Van Haren, Marcus Adrianus Van De Kerkhof | 2015-03-17 |
| 8968630 | Imprint lithography | Yvonne Wendela Kruijt-Stegeman, Andre Bernardus Jeunink | 2015-03-03 |
| 8908147 | Method and apparatus for determining an overlay error | Maurits Van Der Schaar, Andreas Fuchs, Martyn John Coogans, Kaustuve Bhattacharyya, Stephen Morgan +1 more | 2014-12-09 |
| 8889055 | Imprint lithography method | Sander Frederik Wuister | 2014-11-18 |
| 8885150 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Henricus Petrus Maria Pellemans | 2014-11-11 |
| 8868387 | Method of optimizing a model, a method of measuring a property, a device manufacturing method, a spectrometer and a lithographic apparatus | Hugo Augustinus Joseph Cramer, Jouke Krist, Willem Jan Grootjans | 2014-10-21 |
| 8842293 | Level sensor arrangement for lithographic apparatus and device manufacturing method | Jozef Petrus Henricus Benschop, Ralph Brinkhof, Lukasz Jerzy Macht | 2014-09-23 |
| 8830447 | Inspection method for lithography | Hugo Augustinus Joseph Cramer, Paul Christiaan Hinnen | 2014-09-09 |
| 8830455 | Inspection method and apparatus | Vadim Yevgenyevich Banine, Sander Frederik Wuister, Luigi Scaccabarozzi | 2014-09-09 |
| 8830472 | Method of assessing a model of a substrate, an inspection apparatus and a lithographic apparatus | Hugo Augustinus Joseph Cramer, Marcus Adrianus Van De Kerkhof, Henricus Petrus Maria Pellemans, Martin Ebert | 2014-09-09 |
| 8823922 | Overlay measurement apparatus, lithographic apparatus and device manufacturing method using such overlay measurement apparatus | — | 2014-09-02 |
| 8767183 | Method of overlay measurement, lithographic apparatus, inspection apparatus, processing apparatus and lithographic processing cell | — | 2014-07-01 |
| 8760662 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Arno Jan Bleeker, Youri Johannes Laurentius Maria Van Dommelen, Mircea Dusa, Antoine Gaston Marie Kiers, Paul Frank Luehrmann +4 more | 2014-06-24 |
| 8749775 | Inspection method and apparatus | Leonardus Henricus Marie Verstappen | 2014-06-10 |
| 8743361 | Imprint lithography method and apparatus | Johan Frederik Dijksman, Sander Frederik Wuister, Martinus Bernardus Van Der Mark | 2014-06-03 |
| 8730476 | Tunable wavelength illumination system | Earl William Ebert, Harry Sewell, Keith Andersen, Sanjeev Singh | 2014-05-20 |
| 8675210 | Level sensor, lithographic apparatus, and substrate surface positioning method | Jozef Petrus Henricus Benschop, Ralph Brinkhof, Willem Jurrianus Venema, Lukasz Jerzy Macht, Laurent Khuat Duy +1 more | 2014-03-18 |
| 8670118 | Diffraction based overlay metrology tool and method of diffraction based overlay metrology | — | 2014-03-11 |
| 8593646 | Measuring method, measuring apparatus, lithographic apparatus and device manufacturing method | Marcel Hendrikus Maria Beems, Theodorus Petrus Maria Cadee, Raymond Wilhelmus Louis Lafarre | 2013-11-26 |
| 8553230 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Arno Jan Bleeker, Youri Johannes Laurentius Maria Van Dommelen, Mircea Dusa, Antoine Gaston Marie Kiers, Paul Frank Luehrmann +4 more | 2013-10-08 |
| 8529823 | Imprint lithography | Vadim Yevgenyevich Banine, Andre Bernardus Jeunink, Sander Frederik Wuister, Yvonne Wendela Kruijt-Stegeman | 2013-09-10 |
| 8508736 | Tunable wavelength illumination system | Harry Sewell, Keith William ANDRESEN, Earl William Ebert, Sanjeev Singh | 2013-08-13 |