Issued Patents All Time
Showing 101–125 of 251 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10241055 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Arno Jan Bleeker, Youri Johannes Laurentius Maria Van Dommelen, Mircea Dusa, Antoine Gaston Marie Kiers, Paul Frank Luehrmann +4 more | 2019-03-26 |
| 10234771 | HHG source, inspection apparatus and method for performing a measurement | Nan Lin, Sander Bas Roobol, Simon Gijsbert Josephus Mathijssen, Niels Geypen | 2019-03-19 |
| 10209061 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Henricus Petrus Maria Pellemans | 2019-02-19 |
| 10180628 | Method of determining critical-dimension-related properties, inspection apparatus and device manufacturing method | Hugo Augustinus Joseph Cramer, Henricus Johannes Lambertus Megens, Maurits Van Der Schaar, Te-Chih Huang | 2019-01-15 |
| 10180629 | Lithographic apparatus and device manufacturing method | Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +16 more | 2019-01-15 |
| 10139277 | Metrology method and apparatus, lithographic apparatus, and device manufacturing method | — | 2018-11-27 |
| 10133188 | Metrology method, target and substrate | Martin Jacobus Johan Jak, Martin Ebert | 2018-11-20 |
| 10101671 | Metrology methods, metrology apparatus and device manufacturing method | Richard Quintanilha | 2018-10-16 |
| 10078268 | Determination of stack difference and correction using stack difference | Kaustuve Bhattacharyya | 2018-09-18 |
| 10073357 | Measuring a process parameter for a manufacturing process involving lithography | Maurits Van Der Schaar, Omer Abubaker Omer Adam, Te-Chih Huang, Youping Zhang | 2018-09-11 |
| 10067068 | Lithographic apparatus and method for performing a measurement | Simon Gijsbert Josephus Mathijssen, Nan Lin, Sander Bas Roobol | 2018-09-04 |
| 10042268 | Method, apparatus and substrates for lithographic metrology | Hendrik Jan Hidde Smilde, Omer Abubaker Omer Adam, Martin Jacobus Johan Jak | 2018-08-07 |
| 10025199 | Method of designing metrology targets, substrates having metrology targets, method of measuring overlay, and device manufacturing method | Kaustuve Bhattacharyya | 2018-07-17 |
| 10001711 | Inspection method, lithographic apparatus, mask and substrate | Youri Johannes Laurentius Maria Van Dommelen, Peter David Engblom, Lambertus Gerardus Maria Kessels, Kaustuve Bhattacharyya, Paul Christiaan Hinnen +1 more | 2018-06-19 |
| 9990462 | Computational wafer inspection | Christophe David Fouquet, Bernardo Kastrup, Johannes Catharinus Hubertus Mulkens, James Benedict Kavanagh, James Patrick Koonmen +1 more | 2018-06-05 |
| 9970747 | Position measurement with illumination profile having two diametrically opposed off-axis radiation | Justin Kreuzer, Simon Gijsbert Josephus Mathijssen | 2018-05-15 |
| 9958774 | Imprint lithography | Andre Bernardus Jeunink, Sander Frederik Wuister, Yvonne Wendela Kruijt-Stegeman | 2018-05-01 |
| 9952518 | Inspection method and apparatus and lithographic apparatus | — | 2018-04-24 |
| 9939742 | Method and apparatus for measuring asymmetry of a microstructure, position measuring method, position measuring apparatus, lithographic apparatus and device manufacturing method | Patricius Aloysius Jacobus Tinnemans, Simon Gijsbert Josephus Mathijssen | 2018-04-10 |
| 9933250 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Henricus Petrus Maria Pellemans | 2018-04-03 |
| 9927726 | Polarization independent interferometer | Patricius Aloysius Jacobus Tinnemans, Justin Kreuzer, Simon Gijsbert Josephus Mathijssen | 2018-03-27 |
| 9909996 | Diffraction based overlay metrology tool and method of diffraction based overlay metrology | — | 2018-03-06 |
| 9869940 | Metrology method and apparatus, computer program and lithographic system | Si-Han Zeng, Yue-Lin Peng, Jen-Yu Fang, Alexander Straaijer, Ching-Yi Hung +1 more | 2018-01-16 |
| 9857703 | Alignment sensor and lithographic apparatus | Simon Gijsbert Josephus Mathijssen, Justin Kreuzer, Patricius Aloysius Jacobus Tinnemans | 2018-01-02 |
| 9835954 | Inspection method and apparatus, substrates for use therein and device manufacturing method | Erik Willem Bogaart, Franciscus Godefridus Casper Bijnen, Simon Gijsbert Josephus Mathijssen | 2017-12-05 |