Issued Patents All Time
Showing 126–150 of 251 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9778025 | Method and apparatus for measuring asymmetry of a microstructure, position measuring method, position measuring apparatus, lithographic apparatus and device manufacturing method | Simon Gijsbert Josephus Mathijssen, Erik Willem Bogaart, Patricius Aloysius Jacobus Tinnemans | 2017-10-03 |
| 9704810 | Method and apparatus for determining an overlay error | — | 2017-07-11 |
| 9658528 | Imprint lithography | Yvonne Wendela Kruijt-Stegeman, Andre Bernardus Jeunink | 2017-05-23 |
| 9632039 | Inspection apparatus, inspection method and manufacturing method | Simon Gijsbert Josephus Mathijssen, Nitesh Pandey, Stefan Michiel Witte, Kjeld Sijbrand Eduard Eikema | 2017-04-25 |
| 9625811 | Imprint lithography | Sander Frederik Wuister, Yvonne Wendela Kruijt-Stegeman | 2017-04-18 |
| 9605947 | Position measurement with illumination profile having regions confined to peripheral portion of pupil | Justin Kreuzer, Simon Josephus Mathijssen | 2017-03-28 |
| 9606442 | Position measuring apparatus, position measuring method, lithographic apparatus and device manufacturing method | Simon Gijsbert Josephus Mathijssen | 2017-03-28 |
| 9551939 | Mark position measuring apparatus and method, lithographic apparatus and device manufacturing method | Simon Gijsbert Josephus Mathijssen, Stanley Drazkiewicz, Justin Kreuzer, Gerrit Johannes Nijmeijer | 2017-01-24 |
| 9547241 | Alignment sensor, lithographic apparatus and alignment method | Simon Gijsbert Josephus Mathijssen, Patricius Aloysius Jacobus Tinnemans | 2017-01-17 |
| 9541843 | Lithographic apparatus and device manufacturing method involving a sensor detecting a radiation beam through liquid | Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more | 2017-01-10 |
| 9535322 | Imprint lithography | Andre Bernardus Jeunink, Sander Frederik Wuister, Yvonne Wendela Kruijt-Stegeman | 2017-01-03 |
| 9507907 | Computational wafer inspection | Christophe David Fouquet, Bernardo Kastrup, Johannes Catharinus Hubertus Mulkens, James Benedict Kavanagh, James Patrick Koonmen +1 more | 2016-11-29 |
| 9506743 | Position measuring apparatus, position measuring method, lithographic apparatus and device manufacturing method | Justin Kreuzer, Simon Gijsbert Josephus Mathijssen, Gerrit Johannes Nijmeijer, J. Christian Swindal, Patricius Aloysius Jacobus Tinnemans +1 more | 2016-11-29 |
| 9494872 | Inspection method for lithography | Kaustuve Bhattacharyya, Marcus Adrianus Van De Kerkhof, Maurits Van Der Schaar | 2016-11-15 |
| 9488922 | Methods and apparatus for inspection of articles, EUV lithography reticles, lithography apparatus and method of manufacturing devices | Yuri Vainer, Vadim Yevgenyevich Banine, Luigi Scaccabarozzi | 2016-11-08 |
| 9303978 | Optical apparatus, method of scanning, lithographic apparatus and device manufacturing method | — | 2016-04-05 |
| 9279657 | Level sensor arrangement in a lithographic apparatus for measuring multi-layer surfaces | Simon Gijsbert Josephus Mathijssen | 2016-03-08 |
| 9235141 | Inspection apparatus and method for measuring a property of a substrate | Maurits Van Der Schaar, Everhardus Cornelis Mos, Andreas Fuchs, Martyn John Coogans, Hendrik Jan Hidde Smilde | 2016-01-12 |
| 9222834 | Inspection apparatus and method | — | 2015-12-29 |
| 9223227 | Inspection apparatus and method, lithographic apparatus, lithographic processing cell and device manufacturing method | Kaustuve Bhattacharyya, Stefan Carolus Jacobus Antonius Keij, Peter Clement Paul Vanoppen | 2015-12-29 |
| 9163935 | Device manufacturing method and associated lithographic apparatus, inspection apparatus, and lithographic processing cell | Kaustuve Bhattacharyya, Martin Jacobus Johan Jak, Michael Kubis | 2015-10-20 |
| 9152058 | Lithographic apparatus and device manufacturing method involving a member and a fluid opening | Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more | 2015-10-06 |
| 9122178 | Object inspection systems and methods | Vitalii Ivanov, Vadim Yevgenyevich Banine, Luigi Scaccabarozzi, Nikolay Nikolaevich Iosad | 2015-09-01 |
| 9110385 | Metrology method and apparatus, lithographic apparatus, and device manufacturing method | — | 2015-08-18 |
| 9081303 | Methods and scatterometers, lithographic systems, and lithographic processing cells | Hugo Augustinus Joseph Cramer, Henricus Johannes Lambertus Megens, Hendrik Jan Hidde Smilde, Adrianus Johannes Hendrikus Schellekens, Michael Kubis | 2015-07-14 |