Issued Patents All Time
Showing 176–200 of 251 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8497976 | Substrate measurement method and apparatus | Wilhelmus Maria Corbeij, Everhardus Cornelis Mos | 2013-07-30 |
| 8488107 | Lithographic apparatus and device manufacturing method involving a level sensor having multiple projection units and detection units | Frank Staals, Lukasz Jerzy Macht | 2013-07-16 |
| 8482845 | Lithographic apparatus and device manufacturing method | Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more | 2013-07-09 |
| 8454849 | Imprint lithography | Sander Frederik Wuister, Vadim Yevgenyevich Banine, Yvonne Wendela Kruijt-Stegeman, Tatyana Viktorovna Rakhimova, Dmitriy Viktorovich Lopaev +3 more | 2013-06-04 |
| 8411287 | Metrology method and apparatus, lithographic apparatus, device manufacturing method and substrate | Hendrik Jan Hidde Smilde, Arno Jan Bleeker, Armand Eugene Albert Koolen, Henricus Petrus Maria Pellemans, Reinder Teun Plug +1 more | 2013-04-02 |
| 8363218 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | — | 2013-01-29 |
| 8351024 | Lithographic apparatus and device manufacturing method involving a level sensor having a detection grating including three or more segments | — | 2013-01-08 |
| 8339595 | Diffraction based overlay metrology tool and method | — | 2012-12-25 |
| 8319968 | Imprint lithography | Andre Bernardus Jeunink, Johannes Petrus Martinus Bernardus Vermeulen, Pascal Antonius Smits, Sander Frederik Wuister, Yvonne Wendela Kruijt-Stegeman +1 more | 2012-11-27 |
| 8264686 | Lithographic apparatus and device manufacturing method using overlay measurement | Everhardus Cornelis Mos, Maurits Van Der Schaar, Stefan Carolus Jacobus Antonius Keij | 2012-09-11 |
| 8248608 | Imprint lithography | — | 2012-08-21 |
| 8189195 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Hugo Augustinus Joseph Cramer, Mircea Dusa, Irwan Dani Setija | 2012-05-29 |
| 8154708 | Lithographic apparatus and device manufacturing method | Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +16 more | 2012-04-10 |
| 8120001 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Yevgeniy Konstantinovich Shmarev | 2012-02-21 |
| 8111398 | Method of measurement, an inspection apparatus and a lithographic apparatus | Maurits Van Der Schaar, Everhardus Cornelis Mos | 2012-02-07 |
| 8064056 | Substrate used in a method and apparatus for angular-resolved spectroscopic lithography characterization | Maurits Van Der Schaar, Everhardus Cornelis Mos, Stefan Carolus Jacobus Antonius Keij | 2011-11-22 |
| 8054467 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Arno Jan Bleeker, Youri Johannes Laurentius Maria Van Dommelen, Mircea Dusa, Antoine Gaston Marie Kiers, Paul Frank Luehrmann +4 more | 2011-11-08 |
| 8031337 | Angularly resolved scatterometer | — | 2011-10-04 |
| 7961309 | Metrology tool, system comprising a lithographic apparatus and a metrology tool, and a method for determining a parameter of a substrate | Reinder Teun Plug, Karel Diederick Van Der Mast | 2011-06-14 |
| 7916284 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Mircea Dusa, Hugo Augustinus Joseph Cramer | 2011-03-29 |
| 7911612 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Antoine Gaston Marie Kiers, Maurits Van Der Schaar | 2011-03-22 |
| 7898662 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Maurits Van Der Schaar, Everhardus Cornelis Mos, Stefan Carolus Jacobus Antonius Keij | 2011-03-01 |
| 7880889 | Angularly resolved scatterometer and inspection method | — | 2011-02-01 |
| 7879682 | Marker structure and method for controlling alignment of layers of a multi-layered substrate | Richard Johannes Franciscus Van Haren, Jacobus Burghoorn, Maurits Van Der Schaar, Bart Rijpers | 2011-02-01 |
| 7852459 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Stanislav Smirnov, Adel Joobeur | 2010-12-14 |