Issued Patents All Time
Showing 226–250 of 251 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7486408 | Lithographic apparatus and device manufacturing method with reduced scribe lane usage for substrate measurement | Maurits Van Der Schaar, Richard Johannes Franciscus Van Haren, Everhardus Cornelis Mos | 2009-02-03 |
| 7480050 | Lithographic system, sensor, and method of measuring properties of a substrate | Wilhelmus Maria Corbeij, Mircea Dusa, Reinder Teun Plug | 2009-01-20 |
| 7453577 | Apparatus and method for inspecting a patterned part of a sample | Jan Evert Van Der Werf, Cristian Nicolae Presura | 2008-11-18 |
| 7440079 | Lithographic apparatus, alignment system, and device manufacturing method | Andre Bernardus Jeunink, Henricus Petrus Maria Pellemans, Irwan Dani Setija, Cas Johannes Petrus Maria VAN NUENEN, Stefan Carolus Jacobus Antonius Keij | 2008-10-21 |
| 7403293 | Metrology apparatus, lithographic apparatus, process apparatus metrology method and device manufacturing method | Henricus Petrus Maria Pellemans, Wilhelmus Maria Corbeij, Hans Van Der Laan | 2008-07-22 |
| 7391513 | Lithographic apparatus and device manufacturing method using overlay measurement quality indication | Maurits Van Der Schaar, Everhardus Cornelis Mos, Stefan Carolus Jacobus Antonius Keij | 2008-06-24 |
| 7362673 | Optical recording method and apparatus using this method | Winslow M. Mimnagh, Johannes Hendrikus Maria Spruit | 2008-04-22 |
| 7319506 | Alignment system and method | Maarten Hoogerland, Boguslaw Gajdeczko | 2008-01-15 |
| 7315384 | Inspection apparatus and method of inspection | Mircea Dusa | 2008-01-01 |
| 7312860 | Test pattern, inspection method, and device manufacturing method | Hans Van Der Laan, Antonius Johannes Josephus Van Dijsseldonk, Mircea Dusa, Antoine Gaston Marie Kiers | 2007-12-25 |
| 7213963 | Lithographic apparatus and device manufacturing method | Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more | 2007-05-08 |
| 7151594 | Test pattern, inspection method, and device manufacturing method | Hans Van Der Laan, Antonius Johannes Josephus Van Dijsseldonk, Mircea Dusa, Antoine Gaston Marie Kiers | 2006-12-19 |
| 7148959 | Test pattern, inspection method, and device manufacturing method | Mircea Dusa | 2006-12-12 |
| 7123563 | Optical recording method and apparatus using this method | Winslow M. Mimnagh, Johannes Hendrikus Maria Spruit | 2006-10-17 |
| 7112813 | Device inspection method and apparatus using an asymmetric marker | Frank Bornebroek, Hugo Augustinus Joseph Cramer, Mircea Dusa, Richard Johannes Franciscus Van Haren, Antoine Gaston Marie Kiers +7 more | 2006-09-26 |
| 7084955 | Lithographic apparatus | Cheng-Qun Gui, Henricus Wilhelmus Maria Van Buel, Maurits Van Der Schaar | 2006-08-01 |
| 7064807 | Lithographic apparatus | Cheng-Qun Gui, Henricus Wilhelmus Maria Van Buel, Maurits Van Der Schaar | 2006-06-20 |
| 7030961 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Everhardus Cornelis Mos, Maurits Van Der Schaar | 2006-04-18 |
| 7002667 | Lithographic apparatus with alignment subsystem, device manufacturing method, and device manufactured thereby | Leon Martin Levasier, Ingo Dirnstorfer, Andre Bernardus Jeunink, Stefan Geerte Kruijswijk, Henricus Petrus Maria Pellemans +2 more | 2006-02-21 |
| 6995831 | Lithographic apparatus with alignment subsystem, device manufacturing method, using alignment, and alignment structure | Leon Martin Levasier, Ingo Dirnstorfer, Andre Bernardus Jeunink, Stefan Geerte Kruijswijk, Henricus Petrus Maria Pellemans +2 more | 2006-02-07 |
| 6961116 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Maarten Hoogerland, Boguslaw Gajdeczko | 2005-11-01 |
| 6768539 | Lithographic apparatus | Cheng-Qun Gui, Henricus Van Buel, Maurits Van Der Schaar | 2004-07-27 |
| 6384899 | Lithographic projection apparatus | — | 2002-05-07 |
| 6134209 | Producing optical recording using optimum write power | — | 2000-10-17 |
| 5793737 | Method and apparatus for writing optical recording media with optimum value of write power | — | 1998-08-11 |