Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11391677 | Methods and apparatus for predicting performance of a measurement method, measurement method and apparatus | Stefan Michiel Witte, Gijsbert Simon Matthijs Jansen, Lars Christian Freisem, Simon Gijsbert Josephus Mathijssen | 2022-07-19 |
| 10788765 | Method and apparatus for measuring a structure on a substrate | Stefan Michiel Witte, Alessandro Antoncecchi, Stephen EDWARD, Hao Zhang, Paulus Clemens Maria PLANKEN +3 more | 2020-09-29 |
| 10648919 | Methods and apparatus for predicting performance of a measurement method, measurement method and apparatus | Stefan Michiel Witte, Gijsbert Simon Matthijs Jansen, Lars Christian Freisem, Simon Gijsbert Josephus Mathijssen | 2020-05-12 |
| 10459347 | Inspection method, inspection apparatus and illumination method and apparatus | Dirk Ewoud Boonzajer Flaes, Stefan Michiel Witte | 2019-10-29 |
| 10386735 | Lithographic apparatus alignment sensor and method | Simon Gijsbert Josephus Mathijssen, Arie Jeffrey Den Boef, Nitesh Pandey, Patricius Aloysius Jacobus Tinnemans, Stefan Michiel Witte | 2019-08-20 |
| 10088762 | Inspection apparatus and method | Stefan Michiel Witte | 2018-10-02 |
| 9632039 | Inspection apparatus, inspection method and manufacturing method | Arie Jeffrey Den Boef, Simon Gijsbert Josephus Mathijssen, Nitesh Pandey, Stefan Michiel Witte | 2017-04-25 |