Issued Patents All Time
Showing 126–150 of 222 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9837249 | Radial waveguide systems and methods for post-match control of microwaves | Satoru Kobayashi, Soonam Park, Hideo Sugai | 2017-12-05 |
| 9773648 | Dual discharge modes operation for remote plasma | Tae Seung Cho, Yi-Heng Sen, Soonam Park | 2017-09-26 |
| 9741593 | Thermal management systems and methods for wafer processing systems | David Benjaminson | 2017-08-22 |
| 9728437 | High temperature chuck for plasma processing systems | Toan Q. Tran, Sultan Malik, Shambhu N. Roy, Satoru Kobayashi, Tae Seung Cho +2 more | 2017-08-08 |
| 9725302 | Wafer processing equipment having exposable sensing layers | Leonard Tedeschi, Lili Ji, Olivier Joubert, Philip Allan Kraus, Daniel T. McCormick | 2017-08-08 |
| 9704723 | Processing systems and methods for halide scavenging | Anchuan Wang, Xinglong Chen, Zihui Li, Hiroshi Hamana, Zhijun Chen +5 more | 2017-07-11 |
| 9691645 | Bolted wafer chuck thermal management systems and methods for wafer processing systems | David Benjaminson, Ananda Seelavanth Math, Saravanakumar Natarajan, Shubham Chourey | 2017-06-27 |
| 9681497 | Multi zone heating and cooling ESC for plasma process chamber | Roy C. Nangoy | 2017-06-13 |
| 9666414 | Process chamber for etching low k and other dielectric films | Srinivas D. Nemani, Ellie Yieh, Sergey G. Belostotskiy | 2017-05-30 |
| 9659753 | Grooved insulator to reduce leakage current | Tae Seung Cho, Sang Won Kang, Dongqing Yang, Raymond W. Lu, Peter M. Hillman +3 more | 2017-05-23 |
| 9659803 | Electrostatic chuck with concentric cooling base | Kyle Tantiwong, Samer Banna | 2017-05-23 |
| 9659792 | Processing systems and methods for halide scavenging | Anchuan Wang, Xinglong Chen, Zihui Li, Hiroshi Hamana, Zhijun Chen +5 more | 2017-05-23 |
| 9646807 | Sealing groove methods for semiconductor equipment | Qiwei Liang | 2017-05-09 |
| 9610591 | Showerhead having a detachable gas distribution plate | Vladimir Knyazik, Hamid Noorbakhsh, Jason C. Della Rosa, Zheng John Ye, Jennifer Y. Sun +1 more | 2017-04-04 |
| 9604249 | Innovative top-coat approach for advanced device on-wafer particle performance | Jennifer Y. Sun, Biraja P. Kanungo, Vahid Fioruzdor | 2017-03-28 |
| 9607856 | Selective titanium nitride removal | Xikun Wang, Anchuan Wang, Nitin K. Ingle | 2017-03-28 |
| 9593421 | Particle generation suppressor by DC bias modulation | Jonghoon Baek, Soonam Park, Xinglong Chen | 2017-03-14 |
| 9564296 | Radial waveguide systems and methods for post-match control of microwaves | Satoru Kobayashi, Soonam Park, Hideo Sugai | 2017-02-07 |
| 9499898 | Layered thin film heater and method of fabrication | Son T. Nguyen | 2016-11-22 |
| 9460898 | Plasma generation chamber with smooth plasma resistant coating | Sung Je Kim, Soonam Park | 2016-10-04 |
| 9449850 | Processing systems and methods for halide scavenging | Anchuan Wang, Xinglong Chen, Zihui Li, Hiroshi Hamana, Zhijun Chen +5 more | 2016-09-20 |
| 9412579 | Methods and apparatus for controlling substrate uniformity | S. M. Reza Sadjadi, Hamid Noorbakhsh, John Zheng Ye, David H. Quach, Sean S. Kang | 2016-08-09 |
| 9394615 | Plasma resistant ceramic coated conductive article | Jennifer Y. Sun, Biraja P. Kanungo, Ren-Guan Duan, Hamid Noorbakhsh, Junhan Yuh | 2016-07-19 |
| 9362130 | Enhanced etching processes using remote plasma sources | Nitin K. Ingle, Xinglong Chen, Shankar Venkataraman | 2016-06-07 |
| 9355922 | Systems and methods for internal surface conditioning in plasma processing equipment | Soonam Park, Yufei Zhu, Edwin C. Suarez, Nitin K. Ingle, Jiayin Huang | 2016-05-31 |