Issued Patents All Time
Showing 151–175 of 222 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9343289 | Chemistry compatible coating material for advanced device on-wafer particle performance | Jennifer Y. Sun, Biraja P. Kanungo | 2016-05-17 |
| 9299538 | Radial waveguide systems and methods for post-match control of microwaves | Satoru Kobayashi, Soonam Park | 2016-03-29 |
| 9299537 | Radial waveguide systems and methods for post-match control of microwaves | Satoru Kobayashi, Soonam Park, Hideo Sugai | 2016-03-29 |
| 9285168 | Module for ozone cure and post-cure moisture treatment | Jay D. Pinson, II, Kirby H. Floyd, Adib Khan, Shankar Venkataraman | 2016-03-15 |
| 9222172 | Surface treated aluminum nitride baffle | Muhammad M. Rasheed | 2015-12-29 |
| 9212099 | Heat treated ceramic substrate having ceramic coating and heat treatment for coated ceramics | Jennifer Y. Sun, Ren-Guan Duan, Biraja P. Kanungo | 2015-12-15 |
| 9202736 | Method for refurbishing an electrostatic chuck with reduced plasma penetration and arcing | Kadthala Ramaya Narendrnath, Xinglong Chen, Sudhir Gondhalekar, Muhammad M. Rasheed, Tony Kaushal | 2015-12-01 |
| 9184055 | Processing systems and methods for halide scavenging | Anchuan Wang, Xinglong Chen, Zihui Li, Hiroshi Hamana, Zhijun Chen +5 more | 2015-11-10 |
| 9165783 | Method of patterning a low-k dielectric film | Srinivas D. Nemani, Jeremiah T. Pender, Qingjun Zhou, Sergey G. Belostotskiy | 2015-10-20 |
| 9153442 | Processing systems and methods for halide scavenging | Anchuan Wang, Xinglong Chen, Zihui Li, Hiroshi Hamana, Zhijun Chen +5 more | 2015-10-06 |
| 9144147 | Semiconductor processing system and methods using capacitively coupled plasma | Jang-Gyoo Yang, Matthew L. Miller, Xinglong Chen, Kien N. Chuc, Qiwei Liang +1 more | 2015-09-22 |
| 9132436 | Chemical control features in wafer process equipment | Qiwei Liang, Xinglong Chen, Kien N. Chuc, Soonam Park, Jang-Gyoo Yang +4 more | 2015-09-15 |
| 9117855 | Polarity control for remote plasma | Tae Seung Cho, Yi-Heng Sen, Soonam Park | 2015-08-25 |
| 9093371 | Processing systems and methods for halide scavenging | Anchuan Wang, Xinglong Chen, Zihui Li, Hiroshi Hamana, Zhijun Chen +5 more | 2015-07-28 |
| 9090046 | Ceramic coated article and process for applying ceramic coating | Jennifer Y. Sun, Biraja P. Kanungo, Ren-Guan Duan, Sumit Agarwal | 2015-07-28 |
| 9093389 | Method of patterning a silicon nitride dielectric film | Srinivas D. Nemani, Jeremiah T. Pender, Qingjun Zhou, Sergey G. Belostotskiy | 2015-07-28 |
| 9068265 | Gas distribution plate with discrete protective elements | Kartik Ramaswamy, Kallol Bera, Jennifer Y. Sun | 2015-06-30 |
| 9040422 | Selective titanium nitride removal | Xikun Wang, Anchuan Wang, Nitin K. Ingle | 2015-05-26 |
| 9023732 | Processing systems and methods for halide scavenging | Anchuan Wang, Xinglong Chen, Zihui Li, Hiroshi Hamana, Zhijun Chen +5 more | 2015-05-05 |
| 8941969 | Single-body electrostatic chuck | Senh Thach, Jennifer Y. Sun, Konstantin Makhratchev | 2015-01-27 |
| 8940642 | Method of multiple patterning of a low-K dielectric film | Srinivas D. Nemani, Yifeng Zhou, Ellie Yieh | 2015-01-27 |
| 8937800 | Electrostatic chuck with advanced RF and temperature uniformity | Jennifer Y. Sun, Mark Markovsky, Konstantin Makhratchev, Douglas A. Buchberger, Jr., Samer Banna | 2015-01-20 |
| 8894767 | Flow control features of CVD chambers | Kien N. Chuc, Qiwei Liang, Hanh Nguyen, Xinglong Chen, Matthew L. Miller +5 more | 2014-11-25 |
| 8802572 | Method of patterning a low-k dielectric film | Srinivas D. Nemani, Jeremiah T. Pender, Qingjun Zhou, Sergey G. Belostotskiy | 2014-08-12 |
| 8771538 | Plasma source design | Jang-Gyoo Yang, Matthew L. Miller, Jay D. Pinson, II, Kien N. Chuc | 2014-07-08 |