Issued Patents All Time
Showing 201–222 of 222 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7247222 | Electrochemical processing cell | Michael Yang, Yezdi Dordi, Saravjeet Singh, Sheshraj Tulshibagwale, Nicolay Kovarsky | 2007-07-24 |
| 7223323 | Multi-chemistry plating system | Michael Yang, Ming Xi, Russell C. Ellwanger, Eric Bramwell Britcher, Bernardo Donoso +11 more | 2007-05-29 |
| 7205233 | Method for forming CoWRe alloys by electroless deposition | Sergey Lopatin, Arulkumar Shanmugasundram, Ian Pancham | 2007-04-17 |
| 7189313 | Substrate support with fluid retention band | — | 2007-03-13 |
| 7138014 | Electroless deposition apparatus | Joseph Stevens, Ian Pancham, Donald Olgado, Howard Grunes, Yeuk-Fai Edwin Mok | 2006-11-21 |
| 7025861 | Contact plating apparatus | Nicolay Kovarsky, Michael Yang | 2006-04-11 |
| 6935466 | Lift pin alignment and operation methods and apparatus | Sheshraj Tulshibagwale, Donald Olgado, Avi Tepman | 2005-08-30 |
| 6869516 | Method for removing electrolyte from electrical contacts and wafer touching areas | Michael Yang, Girish Dixit, Vincent E. Burkhart, Allen L. D'Ambra, Yeuk-Fai Edwin Mok +1 more | 2005-03-22 |
| 6824612 | Electroless plating system | Joseph Stevens, Ian Pancham, Donald Olgado, Howard Grunes, Yeuk-Fai Edwin Mok +1 more | 2004-11-30 |
| 6802947 | Apparatus and method for electro chemical plating using backside electrical contacts | Donald Olgado, Michael Anthony Wood | 2004-10-12 |
| 6770565 | System for planarizing metal conductive layers | Donald Olgado, Avi Tepman, Timothy Webb | 2004-08-03 |
| 6742279 | Apparatus and method for rinsing substrates | Joseph Stevens | 2004-06-01 |
| 6673199 | Shaping a plasma with a magnetic field to control etch rate uniformity | John M. Yamartino, Peter Loewenhardt, Saravjeet Singh | 2004-01-06 |
| 6592709 | Method and apparatus for plasma processing | — | 2003-07-15 |
| 6537011 | Method and apparatus for transferring and supporting a substrate | Danny D. WANG, Erwin Polar, Brigitte Stoehr, Mark Wiltse, Yeuk-Fai Edwin Mok +1 more | 2003-03-25 |
| 6466426 | Method and apparatus for thermal control of a semiconductor substrate | Yeuk-Fai Edwin Mok, Dennis Koosau, Danny D. WANG, Senh Thach, Paul Exline | 2002-10-15 |
| 6449871 | Semiconductor process chamber having improved gas distributor | Arnold Kholodenko, Guang-Jye Shiau, Peter Loewenhardt, Shamouil Shamouilian | 2002-09-17 |
| 6444040 | Gas distribution plate | Harald Herchen, David Palagashvili, Alex Schreiber | 2002-09-03 |
| 6369493 | Microwave plasma applicator having a thermal transfer medium between a plasma containing tube and a cooling jacket | Harald Herchen, Simon Yavelberg, David Palagashvili, Donald Olgado | 2002-04-09 |
| 6326597 | Temperature control system for process chamber | Allen D'Ambra, Edward Floyd, Qiwei Liang, Daniel J. Hoffman, Victor H. Fuentes +2 more | 2001-12-04 |
| 6243966 | Air amplifier with uniform output flow pattern | Edward Floyd | 2001-06-12 |
| 6185839 | Semiconductor process chamber having improved gas distributor | Arnold Kholodenko, Guang-Jye Shiau, Peter Loewenhardt, Shamouil Shamouilian | 2001-02-13 |