Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6508198 | Automatic tuning in a tapped RF transformer inductive source of a plasma reactor for processing a semiconductor wafer | Daniel J. Hoffman, Peter Loewenhardt, Qiwei Liang | 2003-01-21 |
| 6326597 | Temperature control system for process chamber | Dmitry Lubomirsky, Allen D'Ambra, Edward Floyd, Qiwei Liang, Daniel J. Hoffman +2 more | 2001-12-04 |