Issued Patents All Time
Showing 1–25 of 57 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12385138 | Plasma-enhanced deposition of film stacks | Jason Dirk Haverkamp, Pramod Subramonium, Joseph L. Womack, Dong Niu, Keith Fox +5 more | 2025-08-12 |
| 12305284 | Apparatus and methods for fine planar non-uniformity improvement | Muhannad Mustafa, Mario D. Silvetti, Sanjeev Baluja | 2025-05-20 |
| 12305278 | Method of reducing titanium nitride etching during tungsten film formation | Kedi Wu, Chenfei Shen, Chi-Chou Lin, Ilanit Fisher, Shih Chung Chen +1 more | 2025-05-20 |
| 12230688 | MOSFET gate engineerinng with dipole films | Yong Yang, Srinivas Gandikota, Steven C. H. Hung, Jacqueline S. Wrench, Yixiong Yang | 2025-02-18 |
| 12114488 | Enhancing gapfill performance of dram word line | Yong Yang, Kunal Bhatnagar, Srinivas Gandikota, Seshadri Ganguli, Jose Alexandro Romero +3 more | 2024-10-08 |
| 12062545 | Fluorine-free tungsten ALD for dielectric selectivity improvement | Ilanit Fisher, Chi-Chou Lin, Kedi Wu, Wen-Ting Chen, Shih Chung Chen +4 more | 2024-08-13 |
| 12051734 | PMOS high-k metal gates | Srinivas Gandikota, Steven C. H. Hung, Jacqueline S. Wrench, Yixiong Yang, Yong Yang | 2024-07-30 |
| 11923172 | Paired dynamic parallel plate capacitively coupled plasmas | Hari Ponnekanti, Tsutomu Tanaka, Dmitry A. Dzilno, Sanjeev Baluja, Mario David Silvetti | 2024-03-05 |
| 11894257 | Single wafer processing environments with spatial separation | Michael R. Rice, Joseph AuBuchon, Sanjeev Baluja | 2024-02-06 |
| 11887856 | Enhanced spatial ALD of metals through controlled precursor mixing | Kelvin Chan, Yihong Chen, Jared Ahmad Lee, Kevin Griffin, Srinivas Gandikota +1 more | 2024-01-30 |
| 11646226 | Method of tuning film properties of metal nitride using plasma | Wenyi Liu, Wei V. Tang, Srinivas Gandikota, Yixiong Yang, Yong Wu +2 more | 2023-05-09 |
| 11581213 | Susceptor wafer chucks for bowed wafers | Abhishek Chowdhury, Vijayabhaskara Venkatagiriyappa, Mihaela Balseanu, Jyoti Prakash Deo, Srinivas Ramakrishna +4 more | 2023-02-14 |
| 11552177 | PMOS high-K metal gates | Srinivas Gandikota, Steven C. H. Hung, Jacqueline S. Wrench, Yixiong Yang, Yong Yang | 2023-01-10 |
| 11530480 | Injector for batch processing and methods of use | Joseph Yudovsky, Kevin Griffin | 2022-12-20 |
| 11515144 | In-situ film annealing with spatial atomic layer deposition | Keiichi Tanaka, Andrew Short, Srinivas Gandikota | 2022-11-29 |
| 11282676 | Paired dynamic parallel plate capacitively coupled plasmas | Hari Ponnekanti, Tsutomu Tanaka, Dmitry A. Dzilno, Sanjeev Baluja, Mario David Silvetti | 2022-03-22 |
| 11261525 | Injector for batch processing and methods of use | Joseph Yudovsky, Kevin Griffin | 2022-03-01 |
| 11133205 | Wafer out of pocket detection | Sanggyum Kim, Prasanth Narayanan, Subramanian Tamilmani | 2021-09-28 |
| 11043386 | Enhanced spatial ALD of metals through controlled precursor mixing | Kelvin Chan, Yihong Chen, Jared Ahmad Lee, Kevin Griffin, Srinivas Gandikota +1 more | 2021-06-22 |
| 11028477 | Bottom-up gap-fill by surface poisoning treatment | Mark Saly, Keiichi Tanaka, Eswaranand Venkatasubramanian, Bhaskar Jyoti Bhuyan, Pramit Manna +2 more | 2021-06-08 |
| 10991586 | In-situ tungsten deposition without barrier layer | Yong Wu, Wei V. Tang, Jianqiu GUO, Wenyi Liu, Yixiong Yang +3 more | 2021-04-27 |
| 10273578 | Top lamp module for carousel deposition chamber | Joseph Yudovsky, Robert T. Trujillo, Kevin Griffin, Garry K. Kwong, Kallol Bera +1 more | 2019-04-30 |
| 10236197 | Processing system containing an isolation region separating a deposition chamber from a treatment chamber | Karthik Janakiraman, Abhijit Basu Mallick, Hari Ponnekanti, Alexandros T. Demos, Mukund Srinivasan +2 more | 2019-03-19 |
| 10214816 | PECVD apparatus for in-situ deposition of film stacks | Jason Dirk Haverkamp, Pramod Subramonium, Joseph L. Womack, Dong Niu, Keith Fox +5 more | 2019-02-26 |
| 10043655 | Plasma activated conformal dielectric film deposition | Shankar Swaminathan, Jon Henri, Dennis M. Hausmann, Pramod Subramonium, Vishwanathan Rangarajan +3 more | 2018-08-07 |