Issued Patents All Time
Showing 126–148 of 148 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7262831 | Lithographic projection apparatus and device manufacturing method using such lithographic projection apparatus | M'hamed Akhssay, Franciscus Antonius Chrysogonus Marie Commissaris, Simon De Groot, Andre Bernardus Jeunink, Wim Tjibbo Tel +2 more | 2007-08-28 |
| 7248334 | Sensor shield | Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens +1 more | 2007-07-24 |
| 7242475 | Method of determining aberration of a projection system of a lithographic apparatus | Haico Victor Kok | 2007-07-10 |
| 7239373 | Lithographic apparatus and device manufacturing method | Patricius Aloysius Jacobus Tinnemans, Laurentius Catrinus Jorritsma | 2007-07-03 |
| 7239370 | Lithographic apparatus and device manufacturing method | Albert Johannes Maria Jansen, Marcel Koenraad Marie Baggen, Johannes Christiaan Maria Jasper, Raymond Laurentius Johannes Schrijver, Richard Joseph Bruls +2 more | 2007-07-03 |
| 7230677 | Lithographic apparatus and device manufacturing method utilizing hexagonal image grids | Patricius Aloysius Jacobus Tinnemans, Willem Jurrianus Venema | 2007-06-12 |
| 7209275 | Method and system for maskless lithography real-time pattern rasterization and using computationally coupled mirrors to achieve optimum feature representation | Azat Latypov, Kars Troost | 2007-04-24 |
| 7196770 | Prewetting of substrate before immersion exposure | Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens, Bob Streefkerk | 2007-03-27 |
| 7187431 | Lithographic apparatus, method of determining properties thereof and computer program | Haico Victor Kok | 2007-03-06 |
| 7183566 | Lithographic apparatus for manufacturing a device | Arno Jan Bleeker | 2007-02-27 |
| 7180577 | Lithographic apparatus and device manufacturing method utilizing a microlens array at an image plane | Huibert Visser | 2007-02-20 |
| 7161654 | Lithographic apparatus and device manufacturing method | Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens, Bob Streefkerk | 2007-01-09 |
| 7148952 | Lithographic apparatus and device manufacturing method | Markus Franciscus Antonius Eurlings, Hako Botma, Jan Bruining, Marcel Mathijs Theodore Marie Dierichs, Antonius Johannes Josephus Van Dijsseldonk +1 more | 2006-12-12 |
| 7126672 | Lithographic apparatus and device manufacturing method | Patricius Aloysius Jacobus Tinnemans, Laurentius Catrinus Jorritsma | 2006-10-24 |
| 7079225 | Lithographic apparatus and device manufacturing method | Anastasius Jacobus Anicetus Bruinsma, Pieter Willem Herman De Jager, Henri Johannes Petrus Vink | 2006-07-18 |
| 7068349 | Method of and preventing focal plane anomalies in the focal plane of a projection system | Ingrid Minnaert-Janssen, Frits Jurgen Van Hout, Peter Van Oorschot, Christian Wagner, Adriaan Roelof Van Zwol +3 more | 2006-06-27 |
| 7034917 | Lithographic apparatus, device manufacturing method and device manufactured thereby | Jeroen Johannes Sophia Maria Mertens, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen, Johannes Catharinus Hubertus Mulkens +1 more | 2006-04-25 |
| 6940587 | Lithographic apparatus and a measurement system | Hans Van Der Laan, Antonius Johannes Josephus Van Dijsseldonk, Martinus Hendrikus Antonius Leenders, Johannes Hubertus Josephina Moors | 2005-09-06 |
| 6887625 | Assist features for use in lithographic projection | Markus Schluter, Donis Flagello, Robert John Socha | 2005-05-03 |
| 6855486 | Lithographic method and apparatus | Jozef Marie Finders, Donis Flagello, Igor Petrus Maria Bouchoms | 2005-02-15 |
| 6809797 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Adrianus Franciscus Petrus Engelen, Hugo Augustinus Joseph Cramer, Jozef Maria Finders, Carsten Kohler | 2004-10-26 |
| 6777139 | Method of calibration of a lithographic apparatus, mask for use in calibration of lithographic apparatus, lithographic apparatus, device manufacturing method, device manufactured thereby | — | 2004-08-17 |
| 6650399 | Lithographic projection apparatus, a grating module, a sensor module, a method of measuring wave front aberrations | Marco Hugo Petrus Moers, Hans Van Der Laan, Robert Wilhelm Willekers, Wilhelmus Petrus De Boeij, Marcus Adrianus Van De Kerkhof | 2003-11-18 |