| 8354209 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens, Christiaan Alexander Hoogendam |
2013-01-15 |
| 8319939 |
Immersion lithographic apparatus and device manufacturing method detecting residual liquid |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens |
2012-11-27 |
| 8264667 |
Lithographic apparatus and device manufacturing method using interferometric and other exposure |
Kars Zeger Troost, James Greeneich |
2012-09-11 |
| 8208123 |
Lithographic apparatus and device manufacturing method |
Erik Roelof Loopstra, Marcel Mathijs Theodore Marie Dierichs, Johannes Christiaan Maria Jasper, Hendricus Johannes Maria Meijer, Uwe Mickan +3 more |
2012-06-26 |
| 8189172 |
Lithographic apparatus and method |
Arno Jan Bleeker |
2012-05-29 |
| 8174674 |
Lithographic apparatus and device manufacturing method |
Johannes Catharinus Hubertus Mulkens, Paul Graupner, Erik Roelof Loopstra, Bob Streefkerk |
2012-05-08 |
| 8115899 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens +4 more |
2012-02-14 |
| 8102507 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens, Christiaan Alexander Hoogendam |
2012-01-24 |
| 8049864 |
Device manufacturing method and lithographic apparatus |
Haico Victor Kok, Marcus Adrianus Van De Kerkhof |
2011-11-01 |
| 7961293 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Adrianus Franciscus Petrus Engelen, Jozef Maria Finders, Paul Graeupner, Johannes Catharinus Hubertus Mulkens +1 more |
2011-06-14 |
| 7948606 |
Moving beam with respect to diffractive optics in order to reduce interference patterns |
Huibert Visser, Pieter Willem Herman De Jager, Henri Johannes Petrus Vink |
2011-05-24 |
| 7936444 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +11 more |
2011-05-03 |
| 7898642 |
Lithographic apparatus and device manufacturing method |
Aleksey Yurievich Kolesnychenko, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen, Jeroen Johannes Sophia Maria Mertens +5 more |
2011-03-01 |
| 7880860 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens +4 more |
2011-02-01 |
| 7864295 |
Lithographic apparatus and device manufacturing method utilizing data filtering |
Patricius Aloysius Jacobus Tinnemans |
2011-01-04 |
| 7859647 |
Lithographic apparatus and device manufacturing method |
Arno Jan Bleeker, Marce Mathijs Theodore Marie Dierichs, Stanislav Smirnov, Christian Wagner, Lev Ryzhikov +1 more |
2010-12-28 |
| 7834977 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens +1 more |
2010-11-16 |
| 7834980 |
Lithographic apparatus and method |
Andrey Sergeevich TYCHKOV |
2010-11-16 |
| 7812924 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens, Bob Streefkerk |
2010-10-12 |
| 7773287 |
Method and system for maskless lithography real-time pattern rasterization and using computationally coupled mirrors to achieve optimum feature representation |
Azat Latypov, Kars Troost |
2010-08-10 |
| 7738077 |
Patterning device utilizing sets of stepped mirrors and method of using same |
Patricius Aloysius Jacobus Tinnemans |
2010-06-15 |
| 7728954 |
Reflective loop system producing incoherent radiation |
Kenji Ueyama |
2010-06-01 |
| 7670730 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens, Christiaan Alexander Hoogendam |
2010-03-02 |
| 7652751 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens +1 more |
2010-01-26 |
| 7649702 |
Immersion lithography objective |
Bernhard Gellrich, Paul Graeupner, Juergen Fischer, Andreas Wurmbrand, Bauke Jansen +2 more |
2010-01-19 |
