Issued Patents All Time
Showing 101–125 of 148 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7649676 | System and method to form unpolarized light | Huibert Visser | 2010-01-19 |
| 7643127 | Prewetting of substrate before immersion exposure | Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens, Bob Streefkerk | 2010-01-05 |
| 7626684 | Lithographic projection apparatus and a device manufacturing method using such lithographic projection apparatus | Andre Bernardus Jeunink, M'hamed Akhssay, Franciscus Antonius Chrysogonus Marie Commissaris, Simon De Groot, Wim Tjibbo Tel +3 more | 2009-12-01 |
| 7561252 | Interferometric lithography system and method used to generate equal path lengths of interfering beams | Harry Sewell | 2009-07-14 |
| 7545481 | Lithographic apparatus and device manufacturing method | Bob Streefkerk, Paul Graupner, Jan Haisma, Nicodemus Hattu, Christiaan Alexander Hoogendam +3 more | 2009-06-09 |
| 7528929 | Lithographic apparatus and device manufacturing method | Bob Streefkerk, Richard Joseph Bruls, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +8 more | 2009-05-05 |
| 7499146 | Lithographic apparatus and device manufacturing method, an integrated circuit, a flat panel display, and a method of compensating for cupping | Kars Zeger Troost, Arno Jan Bleeker, Louis John Markoya, Neal Callan, Nicholas K. Eib | 2009-03-03 |
| 7500218 | Lithographic apparatus, method, and computer program product for generating a mask pattern and device manufacturing method using same | Kars Zeger Troost, Karel Diederick Van Der Mast | 2009-03-03 |
| 7466394 | Lithographic apparatus and device manufacturing method using a compensation scheme for a patterning array | Kars Zeger Troost | 2008-12-16 |
| 7463330 | Lithographic apparatus and device manufacturing method | Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens | 2008-12-09 |
| 7459710 | Lithographic apparatus, method for calibrating and device manufacturing method | Arno Jan Bleeker | 2008-12-02 |
| 7436502 | Illumination beam measurement | Henricus Jozef Peter Lenders, Dilek Kaya | 2008-10-14 |
| 7433015 | Lithographic apparatus and device manufacturing method | Johannes Catharinus Hubertus Mulkens, Paul Graupner, Erik Roelof Loopstra, Bob Streefkerk | 2008-10-07 |
| 7403264 | Lithographic projection apparatus and a device manufacturing method using such lithographic projection apparatus | Andre Bernardus Jeunink, M'hamed Akhssay, Franciscus Antonius Chrysogonus Marie Commissaris, Simon De Groot, Wim Tjibbo Tel +3 more | 2008-07-22 |
| 7403265 | Lithographic apparatus and device manufacturing method utilizing data filtering | Patricius Aloysius Jacobus Tinnemans | 2008-07-22 |
| 7391503 | System and method for compensating for thermal expansion of lithography apparatus or substrate | Willem Jurrianus Venema | 2008-06-24 |
| 7379159 | Lithographic apparatus and device manufacturing method | Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens +1 more | 2008-05-27 |
| 7375796 | Lithographic apparatus and device manufacturing method | Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogedam, Hans Jansen, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens +1 more | 2008-05-20 |
| 7352434 | Lithographic apparatus and device manufacturing method | Bob Streefkerk, Levinus Pieter Bakker, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders +12 more | 2008-04-01 |
| 7352435 | Lithographic apparatus and device manufacturing method | Bob Streefkerk, Adrianus Franciscus Petrus Engelen, Jozef Maria Finders, Paul Graeupner, Johannes Catharinus Hubertus Mulkens +1 more | 2008-04-01 |
| 7342644 | Methods and systems for lithographic beam generation | Anastasius Jacobus Anicetus Bruinsma, Pieter Willem Herman De Jager, Robert-Han Munnig Schmidt, Henri Johannes Petrus Vink | 2008-03-11 |
| 7333175 | Method and system for aligning a first and second marker | — | 2008-02-19 |
| 7332733 | System and method to correct for field curvature of multi lens array | Laurentius Catrinus Jorritsma | 2008-02-19 |
| 7330239 | Lithographic apparatus and device manufacturing method utilizing a blazing portion of a contrast device | Huibert Visser, Henri Johannes Petrus Vink | 2008-02-12 |
| 7304718 | Lithographic apparatus and device manufacturing method | Arno Jan Bleeker, Pieter Willem Herman De Jager, Kars Zeger Troost | 2007-12-04 |