| 9285685 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Adrianus Franciscus Petrus Engelen, Jozef Maria Finders, Paul Graupner, Johannes Catharinus Hubertus Mulkens +1 more |
2016-03-15 |
| 9261402 |
Lithographic method and apparatus |
— |
2016-02-16 |
| 9250536 |
Lithographic apparatus and method |
Heine Melle Mulder, Adrianus Franciscus Petrus Engelen, Markus Franciscus Antonius Eurlings, Hendrikus Robertus Marie Greevenbroek, Patricius Aloysius Jacobus Tinnemans +2 more |
2016-02-02 |
| 9207543 |
Lithographic apparatus and device manufacturing method involving a groove to collect liquid |
Aleksey Yurievich Kolesnychenko, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen, Jeroen Johannes Sophia Maria Mertens +5 more |
2015-12-08 |
| 9134623 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Richard Joseph Bruls, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +8 more |
2015-09-15 |
| 9134622 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Richard Joseph Bruls, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +8 more |
2015-09-15 |
| 9104117 |
Lithographic apparatus having a liquid detection system |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens |
2015-08-11 |
| 8964164 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +11 more |
2015-02-24 |
| 8941811 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens +4 more |
2015-01-27 |
| 8937706 |
Lithographic apparatus and method |
Heine Melle Mulder, Adrianus Franciscus Petrus Engelen, Markus Franciscus Antonius Eurlings, Hendrikus Robertus Marie Van Greevenbroek, Paul Van Der Veen |
2015-01-20 |
| 8817235 |
Lithographic apparatus and method involving a pockels cell |
Patricius Aloysius Jacobus Tinnemans |
2014-08-26 |
| 8755033 |
Lithographic apparatus and device manufacturing method involving a barrier to collect liquid |
Aleksey Yurievich Kolesnychenko, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen, Jeroen Johannes Sophia Maria Mertens +5 more |
2014-06-17 |
| 8724083 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +11 more |
2014-05-13 |
| 8724084 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +11 more |
2014-05-13 |
| 8711330 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Adrianus Franciscus Petrus Engelen, Jozef Maria Finders, Paul Graeupner, Johannes Catharinus Hubertus Mulkens +1 more |
2014-04-29 |
| 8704998 |
Lithographic apparatus and device manufacturing method involving a barrier to collect liquid |
Aleksey Yurievich Kolesnychenko, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen, Jeroen Johannes Sophia Maria Mertens +5 more |
2014-04-22 |
| 8692974 |
Lithographic apparatus and device manufacturing method using pupil filling by telecentricity control |
— |
2014-04-08 |
| 8681309 |
Lithographic apparatus and device manufacturing method |
Johannes Christiaan Maria Jasper |
2014-03-25 |
| 8638419 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens +4 more |
2014-01-28 |
| 8634056 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Richard Joseph Bruls, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +8 more |
2014-01-21 |
| 8610878 |
Lithographic apparatus and method |
Francis Fahrni, Gerardus Johannes Joseph Keijsers, Heine Melle Mulder, Willem Richard Pongers, Joost Cyrillus Lambert Hageman +5 more |
2013-12-17 |
| 8570486 |
Lithographic apparatus and device manufacturing method |
Johannes Catharinus Hubertus Mulkens, Paul Graupner, Erik Roelof Loopstra, Bob Streefkerk |
2013-10-29 |
| 8547519 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Richard Joseph Bruls, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +8 more |
2013-10-01 |
| 8508715 |
Lithographic apparatus and device manufacturing method utilizing data filtering |
Patricius Aloysius Jacobus Tinnemans |
2013-08-13 |
| 8472006 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Paul Graupner, Jan Haisma, Nicodemus Hattu, Christiaan Alexander Hoogendam +3 more |
2013-06-25 |
