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Lithographic apparatus and method |
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2019-03-05 |
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Lithographic method and apparatus |
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2019-01-08 |
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Lithographic apparatus and device manufacturing method |
Erik Roelof Loopstra, Marcel Mathijs Theodore Marie Dierichs, Johannes Christiaan Maria Jasper, Matthew Lipson, Hendricus Johannes Maria Meijer +3 more |
2018-12-04 |
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Lithographic apparatus and method |
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2018-11-27 |
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Lithographic method and apparatus |
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2018-09-18 |
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Immersion lithographic apparatus and device manufacturing method |
Theodorus Wilhelmus Polet, Willem Jan Bouman, Han Henricus Aldegonda Lempens, Theodorus Marinus Modderman, Cornelius Maria Rops +3 more |
2018-06-19 |
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Lithographic method and apparatus |
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2018-06-05 |
| 9989861 |
Lithographic apparatus and device manufacturing method |
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2018-06-05 |
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Lithographic apparatus and device manufacturing method |
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2018-04-24 |
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Lithographic method and apparatus |
Johannes Christiaan Maria Jasper |
2018-02-27 |
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Lithographic apparatus and device manufacturing method utilizing data filtering |
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2017-12-19 |
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Lithographic apparatus and device manufacturing method |
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2017-11-28 |
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Lithographic method and apparatus |
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2017-11-14 |
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Lithographic apparatus and device manufacturing method |
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2017-10-24 |
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Lithographic method and apparatus |
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2017-10-17 |
| 9778575 |
Lithographic apparatus and method |
Heine Melle Mulder, Adrianus Franciscus Petrus Engelen, Markus Franciscus Antonius Eurlings, Hendrikus Robertus Marie Van Greevenbroek, Paul Van Der Veen +2 more |
2017-10-03 |
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Patterning device, method of producing a marker on a substrate and device manufacturing method |
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2017-08-08 |
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Lithographic apparatus and device manufacturing method |
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2017-07-11 |
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Lithographic apparatus and device manufacturing method |
Erik Roelof Loopstra, Marcel Mathijs Theodore Marie Dierichs, Johannes Christiaan Maria Jasper, Matthew Lipson, Hendricus Johannes Maria Meijer +3 more |
2017-03-28 |
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Lithographic apparatus and device manufacturing method |
Aleksey Yurievich Kolesnychenko, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen, Jeroen Johannes Sophia Maria Mertens +5 more |
2017-02-14 |
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Lithographic apparatus and device manufacturing method |
Erik Roelof Loopstra |
2016-12-27 |
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Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +11 more |
2016-10-25 |
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Lithographic apparatus and device manufacturing method |
Erik Roelof Loopstra, Marcel Mathijs Theodore Marie Dierichs, Johannes Christiaan Maria Jasper, Matthew Lipson, Hendricus Johannes Maria Meijer +3 more |
2016-09-13 |
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Lithographic method and assembly |
Shaoxian Zhang, Johannes Christiaan Maria Jasper |
2016-08-23 |
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Lithographic method and apparatus |
Johannes Christiaan Maria Jasper |
2016-04-05 |
