Issued Patents All Time
Showing 51–75 of 92 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7639418 | Multi-layer spectral purity filter, lithographic apparatus including such a spectral purity filter, device manufacturing method, and device manufactured thereby | Vadim Yevgenyevich Banine, Leonid Shmaenok, Nikolay Nikolaevitch Salashchenko | 2009-12-29 |
| 7629594 | Lithographic apparatus, and device manufacturing method | Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine, Johannes Peterus Henricus De Kuster, Lucas Henricus Johannes Stevens, Bastiaan Theodoor Wolschrijn +5 more | 2009-12-08 |
| 7598503 | Lithographic apparatus and cleaning method therefor | Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine, Derk Jan Wilfred Klunder | 2009-10-06 |
| 7515245 | Lithographic apparatus and device manufacturing method | Vadim Yevgenyevich Banine | 2009-04-07 |
| 7508487 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Johannes Catharinus Hubertus Mulkens, Paul Van Der Veen, Willem Van Schaik, Vadim Yevgenyevich Banine, Levinus Pieter Bakker +1 more | 2009-03-24 |
| 7501642 | Radiation source | Vadim Yevgenyevich Banine, Johannes Christiaan Leonardus Franken, Vladimir Vitalevitch Ivanov, Konstantin Nikolaevitch Koshelev, Alexander Matthijs Struycken | 2009-03-10 |
| 7491951 | Lithographic apparatus, system and device manufacturing method | Marc Hubertus Lorenz Van Der Velden, Vadim Yevgenyevich Banine, Bastiaan Mertens, Markus Weiss, Bastiaan Theodoor Wolschrijn +1 more | 2009-02-17 |
| 7492443 | Device manufacturing method, device manufactured thereby and a mask for use in the method | Jan Evert Van Der Werf, Erik Roelof Loopstra, Hans Meiling, Martinus Hendrikus Antonius Leenders | 2009-02-17 |
| 7485881 | Lithographic apparatus, illumination system, filter system and method for cooling a support of such a filter system | Arnoud Cornelis Wassink, Levinus Pieter Bakker, Frank Jeroen Pieter Schuurmans | 2009-02-03 |
| 7473908 | Getter and cleaning arrangement for a lithographic apparatus and method for cleaning a surface | Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine, Wouter Anton Soer | 2009-01-06 |
| 7462850 | Radical cleaning arrangement for a lithographic apparatus | Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Bastiaan Theodoor Wolschrijn, Derk Jan Wilfred Klunder, Maarten Marinus Johannes Wilhelmus Van Herpen | 2008-12-09 |
| 7459690 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Jan Evert Van Der Werf, Mark Kroon, Wilhelmus Cornelis Keur, Vadim Yevgenyevich Banine, Hans Van Der Laan +1 more | 2008-12-02 |
| 7414700 | Method for the removal of deposition on an optical element, method for the protection of an optical element, device manufacturing method, apparatus including an optical element, and lithographic apparatus | Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine, Carolus Ida Maria Antonius Spee, Derk Jan Wilfred Klunder | 2008-08-19 |
| 7405417 | Lithographic apparatus having a monitoring device for detecting contamination | Lucas Henricus Johannes Stevens, Vadim Yevgenyevich Banine, Bastiaan Theodoor Wolschrijn | 2008-07-29 |
| 7372623 | Multi-layer spectral purity filter, lithographic apparatus including such a spectral purity filter, device manufacturing method, and device manufactured thereby | Vadim Yevgenyevich Banine, Leonid Shmaenok, Nikolay Nikolaevitch Salashchenko | 2008-05-13 |
| 7369216 | Lithographic system, method for adapting transmission characteristics of an optical pathway within a lithographic system, semiconductor device, method of manufacturing a reflective element for use in a lithographic system, and reflective element manufactured thereby | Uwe Mickan, Wolfgang Singer, Hans-Juergen Mann | 2008-05-06 |
| 7361911 | Lithographic apparatus and device manufacturing method | Robertus Nicodemus Jacobus Van Ballegoij, Vadim Yevgenyevich Banine, Gert-Jan Heerens, Frederik T. E. Heuts, Johannes Henricus Wilhelmus Jacobs +2 more | 2008-04-22 |
| 7355672 | Method for the removal of deposition on an optical element, method for the protection of an optical element, device manufacturing method, apparatus including an optical element, and lithographic apparatus | Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine, Carolus Ida Maria Antonius Spee, Derk Jan Wilfred Klunder | 2008-04-08 |
| 7279690 | Lithographic apparatus and device manufacturing method | Levinus Pieter Bakker, Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Konstantin Nikolaevitch Koshelev, Bastiaan Mertens +4 more | 2007-10-09 |
| 7262423 | Radiation system and lithographic apparatus | Maarten Marinus Johannes Wilhelmus Van Herpen, Derk Jan Wilfred Klunder | 2007-08-28 |
| 7251012 | Lithographic apparatus having a debris-mitigation system, a source for producing EUV radiation having a debris mitigation system and a method for mitigating debris | Vadim Yevgenyevich Banine, Levinus Pieter Bakker, Vladimir Vitalevitch Ivanov, Givi Georgievitch Zukavishvili, Abraham Veefkind | 2007-07-31 |
| 7248340 | Lithographic apparatus and patterning device transport | Erik Ham, Robert Gabriël Maria Lansbergen, Ellart Alexander Meijer, Hendricus Johannes Maria Meijer, Hans Meiling +2 more | 2007-07-24 |
| 7245357 | Lithographic apparatus and device manufacturing method | Erwin John Van Zwet, Jan Van Elp, Hendrik Antony Johannes Neerhof, Joost Jeroen Ottens, Adrianus Mathijs Maria De Groof +3 more | 2007-07-17 |
| 7202934 | Lithographic apparatus and device manufacturing method | Erik Ham, Gert-Jan Heerens, Paulus Martinus Maria Liebregts, Erik Roelof Loopstra, Henri Gerard Cato Werij | 2007-04-10 |
| 7193229 | Lithographic apparatus, illumination system and method for mitigating debris particles | Vadim Yevgenyevich Banine, Levinus Pieter Bakker, Aleksey Yurievich Kolesnychenko, Frank Jeroen Pieter Schuurmans | 2007-03-20 |