Issued Patents All Time
Showing 76–92 of 92 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7167232 | Lithographic apparatus and radiation source comprising a debris-mitigation system and method for mitigating debris particles in a lithographic apparatus | Vadim Yevgenyevich Banine, Johannes Peterus Henricus De Kuster, Frank Jeroen Pieter Schuurmans, Lucas Henricus Johannes Stevens | 2007-01-23 |
| 7151589 | Lithographic apparatus and patterning device transport | Erik Ham, Gert-Jan Heerens, Robert Gabriël Maria Lansbergen, Ellard Alexander Meijer, Hendricus Johannes Maria Meijer +2 more | 2006-12-19 |
| 7098994 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Uwe Mickan, Harm-Jan Voorma, Johannes Christiaan Leonardus Franken | 2006-08-29 |
| 7095479 | Lithographic apparatus, device manufacturing method and device manufactured thereby | Lucas Henricus Johannes Stevens, Martinus Hendrikus Antonius Leenders, Hans Meiling | 2006-08-22 |
| 7092072 | Calibration apparatus and method of calibrating a radiation sensor in a lithographic apparatus | Uwe Mickan | 2006-08-15 |
| 7088431 | Lithographic apparatus and device manufacturing method | Joost Jeroen Ottens, Peter Theodorus Maria Giesen | 2006-08-08 |
| 7075620 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Jan Evert Van Der Werf, Mark Kroon, Wilhelmus Cornelis Keur, Vadim Yevgenyevich Banine, Hans Van Der Laan +1 more | 2006-07-11 |
| 7041989 | Lithographic apparatus and device manufacturing method | Hendrik Antony Johannes Neerhof, Joost Jeroen Ottens, Marco Le Kluse | 2006-05-09 |
| 6980281 | Lithographic apparatus and device manufacturing method | Uwe Mickan | 2005-12-27 |
| 6940587 | Lithographic apparatus and a measurement system | Hans Van Der Laan, Johannes Jacobus Matheus Baselmans, Antonius Johannes Josephus Van Dijsseldonk, Martinus Hendrikus Antonius Leenders | 2005-09-06 |
| 6879374 | Device manufacturing method, device manufactured thereby and a mask for use in the method | Jan Evert Van Der Werf, Erik Roelof Loopstra, Hans Meiling, Martinus Hendrikus Antonius Leenders | 2005-04-12 |
| 6781673 | Mask handling apparatus, lithographic projection apparatus, device manufacturing method and device manufactured thereby | Vadim Yevgenyevich Banine, Martinus Hendrikus Antonius Leenders, Henri Gerard Cato Werij, Hugo Matthieu Visser, Gerrit-Jan Heerens +4 more | 2004-08-24 |
| 6750949 | Lithographic apparatus and device manufacturing method | Erik Roelof Loopstra, Dominicus Jacobus Petrus Adrianus Franken, Josephus Jacobus Smits, Antonius Johannes Josephus Van Dijsseldonk, Albrecht Hof +3 more | 2004-06-15 |
| 6741329 | Lithographic apparatus and device manufacturing method | Martinus Hendrikus Antonius Leenders, Erik Roelof Loopstra, Noud Jan Gilissen, Markus Franciscus Antonius Eurlings | 2004-05-25 |
| 6721389 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Jan Evert Van Der Werf, Mark Kroon, Wilhelmus Cornelis Keur, Vadim Yevgenyevich Banine, Hans Van Der Laan +1 more | 2004-04-13 |
| 6597431 | Lithographic projection apparatus and device manufacturing method | Jozef Petrus Henricus Benschop, Oscar Fransiscus Jozephus Noordman, Michael J. M. Renkens, Erik Roelof Loopstra, Vadim Yevgenyevich Banine +1 more | 2003-07-22 |
| 4550963 | Electrical connector | — | 1985-11-05 |