Issued Patents All Time
Showing 26–50 of 92 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8477285 | Particle cleaning of optical elements for microlithography | Dirk Heinrich Ehm, Arnoldus Jan Storm, Almut Czap, Mona Nagel, Jacques Cor Johan Van Der Donck +4 more | 2013-07-02 |
| 8476167 | Lithographic apparatus and method of manufacturing an electrostatic clamp for a lithographic apparatus | Hubert Adriaan Van Mierlo, Erik Ham, Hendricus Johannes Maria Meijer, Hendrik Antony Johannes Neerhof, Joost Jeroen Ottens +3 more | 2013-07-02 |
| 8446560 | Lithographic apparatus comprising a magnet, method for the protection of a magnet in a lithographic apparatus and device manufacturing method | Norbertus Benedictus Koster, Erik R. Loopstra, Martin Frans Pierre Smeets, Antonius Theodorus Wilhelmus Kempen | 2013-05-21 |
| 8445873 | System and method for detecting at least one contamination species in a lithographic apparatus | Vadim Yevgenyevich Banine, Levinus Pieter Bakker, Ralph Kurt, Lucas Henricus Johannes Stevens, Peter Cornelis Zalm | 2013-05-21 |
| 8405055 | Source module, radiation source and lithographic apparatus | Dzmitry Labetski, Vadim Yevgenyevich Banine, Erik Roelof Loopstra, Gerardus Hubertus Petrus Maria Swinkels | 2013-03-26 |
| 8382301 | Optical arrangement, in particular projection exposure apparatus for EUV lithography, as well as reflective optical element with reduced contamination | Dirk Heinrich Ehm, Stephan Muellender, Thomas Stein, Bastiaan Theodoor Wolschrijn, Dieter Kraus +2 more | 2013-02-26 |
| 8368040 | Radiation system and lithographic apparatus | Erik Roelof Loopstra, Vladimir Vitalevich Ivanov, Gerardus Hubertus Petrus Maria Swinkels, Andrei Mikhailovich Yakunin, Dennis De Graaf +1 more | 2013-02-05 |
| 8345223 | Optical element, lithographic apparatus including such an optical element, device manufacturing method, and device manufactured thereby | Wouter Anthon Soer, Vadim Yevgenyevich Banine, Maarten Marinus Johannes Wilhelmus Van Herpen, Andrei Mikhailovich Yakunin | 2013-01-01 |
| 8317929 | Lithographic apparatus comprising an electrical discharge generator and method for cleaning an element of a lithographic apparatus | Tatyana Victorovna Rakhimova, Vadim Yevgenyevich Banine, Vladimir Vitalevich Ivanov, Konstantin Nikolaevitch Koshelev, Aleksander Sergeevich Kovalev +1 more | 2012-11-27 |
| 8279397 | Method for removing contamination on optical surfaces and optical arrangement | Dirk Heinrich Ehm, Bastiaan Theodoor Wolschrijn, Vadim Yevgenyevich Banine, Vladimir Vitalevitsch Ivanov | 2012-10-02 |
| 8269179 | Illumination system and filter system | Arnoud Cornelis Wassink, Levinus Pieter Bakker, Frank Jeroen Pieter Schuurmans | 2012-09-18 |
| 8217347 | System and method for detecting at least one contamination species in a lithographic apparatus | Vadim Yevgenyevich Banine, Levinus Pieter Bakker, Ralph Kurt, Lucas Henricus Johannes Stevens, Peter Cornelis Zalm | 2012-07-10 |
| 8094288 | Lithographic apparatus and device manufacturing method | Vadim Yevgenyevich Banine | 2012-01-10 |
| 7959310 | Optical arrangement and EUV lithography device with at least one heated optical element, operating methods, and methods for cleaning as well as for providing an optical element | Dirk Heinrich Ehm, Annemieke Van De Runstraat, Bastiaan Theodoor Wolschrijn, Arnoldus Jan Storm, Thomas Stein +8 more | 2011-06-14 |
| 7935218 | Optical apparatus, lithographic apparatus and device manufacturing method | Vadim Yevgenyevich Banine, Bastiaan Theodoor Wolschrijn, Carolus Ida Maria Antonius Spee, Rik Jansen | 2011-05-03 |
| 7928412 | Lithographic apparatus, and device manufacturing method | Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine, Johannes Peterus Henricus De Kuster, Lucas Henricus Johannes Stevens, Bastiaan Theodoor Wolschrijn +5 more | 2011-04-19 |
| 7897110 | System and method for detecting at least one contamination species in a lithographic apparatus | Vadim Yevgenyevich Banine, Levinus Pieter Bakker, Ralph Kurt, Lucas Henricus Johannes Stevens, Peter Cornelis Zalm | 2011-03-01 |
| 7868304 | Method for removal of deposition on an optical element, lithographic apparatus, device manufacturing method, and device manufactured thereby | Levinus Pieter Bakker, Vadim Yevgenyevich Banine, Carolus Ida Maria Antonius Spee, Johannes Christiaan Leonardus Franken, Arnoud Cornelis Wassink +1 more | 2011-01-11 |
| 7816658 | Extreme ultra-violet lithographic apparatus and device manufacturing method | Jan Bernard Plechelmus Van Schoot | 2010-10-19 |
| 7812330 | Radical cleaning arrangement for a lithographic apparatus | Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Bastiaan Theodoor Wolschrijn, Derk Jan Wilfred Klunder, Maarten Marinus Johannes Wilhelmus Van Herpen | 2010-10-12 |
| 7800079 | Assembly for detection of radiation flux and contamination of an optical component, lithographic apparatus including such an assembly and device manufacturing method | Vadim Yevgenyevich Banine, Levinus Pieter Bakker, Lucas Henricus Johannes Stevens, Yurii Victorvitch Sidelnikov, Marcel Mathijs Theodore Marie Dierichs +1 more | 2010-09-21 |
| 7763870 | Optical system for radiation in the EUV-wavelength range and method for measuring a contamination status of EUV-reflective elements | Dirk Heinrich Ehm, Hermann Bieg, Hans-Juergen Mann, Stephan Muellender, Bastiaan Theodoor Wolschrijn | 2010-07-27 |
| 7714306 | Lithographic apparatus and device manufacturing method | Levinus Pieter Bakker, Frank Jeroen Pieter Schuurmans | 2010-05-11 |
| 7684012 | Lithographic device, device manufacturing method and device manufactured thereby | Johannes Henricus Wilhelmus Jacobs, Vadim Yevgenyevich Banine, Barrie Dudley Brewster, Vladimir Vitalevitch Ivanov, Bastiaan Mertens +2 more | 2010-03-23 |
| 7671347 | Cleaning method, apparatus and cleaning system | Dirk Heinrich Ehm, Bastiaan Theodoor Wolschrijn, Marcus Gerhardus Hendrikus Meijerink, Thomas Stein | 2010-03-02 |