Issued Patents All Time
Showing 76–100 of 234 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879094 | Electrostatic chucking force measurement tool for process chamber carriers | Gautam Pisharody, Seshadri Ramaswami, Shambhu N. Roy, Niranjan Kumar | 2020-12-29 |
| 10858727 | High density, low stress amorphous carbon film, and process and equipment for its deposition | Jingjing Liu, Zhong Qiang Hua, Adolph Miller Allen, Michael W. Stowell, Chentsau Ying +3 more | 2020-12-08 |
| 10847360 | High pressure treatment of silicon nitride film | Keith Tatseun Wong, Sean S. Kang, Ellie Yieh | 2020-11-24 |
| 10825665 | Directional treatment for multi-dimensional device processing | Ludovic Godet, Huixiong Dai, Ellie Yieh, Nitin K. Ingle | 2020-11-03 |
| 10811250 | Silicon nitride films with high nitrogen content | Atashi Basu, Ellie Yieh | 2020-10-20 |
| 10790183 | Selective oxidation for 3D device isolation | Shiyu Sun, Keith Tatseun Wong, Kurtis Leschkies, Namsung Kim | 2020-09-29 |
| 10748783 | Gas delivery module | Adib Khan, Qiwei Liang, Sultan Malik | 2020-08-18 |
| 10720341 | Gas delivery system for high pressure processing chamber | Qiwei Liang, Sean S. Kang, Adib Khan, Ellie Yieh | 2020-07-21 |
| 10714331 | Method to fabricate thermally stable low K-FinFET spacer | Mihaela Balseanu, Mei-Yee Shek, Ellie Yieh | 2020-07-14 |
| 10704141 | In-situ CVD and ALD coating of chamber to control metal contamination | Sultan Malik, Qiwei Liang, Adib Khan, Maximillian Clemons | 2020-07-07 |
| 10692734 | Methods of patterning nickel silicide layers on a semiconductor device | Jong Mun Kim, Chentsau Chris Ying, He Ren, Ellie Yieh | 2020-06-23 |
| 10675581 | Gas abatement apparatus | Adib Khan, Qiwei Liang, Sultan Malik, Rafika Smati, Joseph Ng +1 more | 2020-06-09 |
| 10636704 | Seam-healing method upon supra-atmospheric process in diffusion promoting ambient | Bencherki Mebarki, Sean S. Kang, Keith Tatseun Wong, He Ren, Mehul Naik +1 more | 2020-04-28 |
| 10590530 | Gas control in process chamber | Qiwei Liang, Ellie Yieh | 2020-03-17 |
| 10586707 | Selective deposition of metal silicides | Raymond Hung, Namsung Kim, Ellie Yieh, Jong Hun Choi, Christopher Ahles +1 more | 2020-03-10 |
| 10570506 | Method to improve film quality for PVD carbon with reactive gas and bias power | Bhargav S. Citla, Jingjing Liu, Zhong Qiang Hua, Chentsau Ying, Ellie Yieh | 2020-02-25 |
| 10566226 | Multi-cassette carrying case | Sriskantharajah Thirunavukarasu, Eng Sheng Peh, Arvind Sundarrajan, Avinash Avula, Ellie Yieh +2 more | 2020-02-18 |
| 10566188 | Method to improve film stability | Maximillian Clemons, Michel R. Frei, Mahendra Pakala, Mehul Naik, Ellie Yieh | 2020-02-18 |
| 10549324 | Method and apparatus for backside cleaning of substrates | Sriskantharajah Thirunavukarasu, Jen Sern Lew, Arvind Sundarrajan | 2020-02-04 |
| 10529603 | High pressure wafer processing systems and related methods | Qiwei Liang, Adib Khan, Venkata Ravishankar Kasibhotla, Sultan Malik, Sean S. Kang +1 more | 2020-01-07 |
| 10474033 | Method and apparatus for post exposure processing of photoresist wafers | Viachslav Babayan, Douglas A. Buchberger, Jr., Qiwei Liang, Ludovic Godet, Daniel J. Woodruff +2 more | 2019-11-12 |
| 10475655 | Selective deposition of metal silicides | Raymond Hung, Namsung Kim, Ellie Yieh, Jong Hun Choi, Christopher Ahles +1 more | 2019-11-12 |
| 10438849 | Microwave anneal to improve CVD metal gap-fill and throughput | He Ren, Jie Zhou, Guannan Chen, Michael W. Stowell, Bencherki Mebarki +3 more | 2019-10-08 |
| 10429747 | Hybrid laser and implant treatment for overlay error correction | Mangesh Ashok BANGAR, Steve Ghanayem, Ellie Yieh | 2019-10-01 |
| 10431427 | Monopole antenna array source with phase shifted zones for semiconductor process equipment | Qiwei Liang | 2019-10-01 |