Issued Patents All Time
Showing 51–75 of 234 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D941787 | Substrate transfer blade | Sultan Malik, Adib Khan, Qiwei Liang | 2022-01-25 |
| 11222769 | Monopole antenna array source with gas supply or grid filter for semiconductor process equipment | Qiwei Liang | 2022-01-11 |
| 11205589 | Methods and apparatuses for forming interconnection structures | He Ren, Hao Jiang, Mehul Naik, Ellie Yieh | 2021-12-21 |
| 11145808 | Methods for etching a structure for MRAM applications | Jong Mun Kim, Minrui Yu, Chando Park, Mang-Mang Ling, Jaesoo Ahn +3 more | 2021-10-12 |
| 11114333 | Method for depositing and reflow of a high quality etch resistant gapfill dielectric film | Ellie Yieh, Chentsau Ying | 2021-09-07 |
| 11114306 | Methods for depositing dielectric material | Bhargav S. Citla, Jethro Tannos, Jingyi Li, Douglas A. Buchberger, Jr., Zhong Qiang Hua +1 more | 2021-09-07 |
| 11112697 | Method and apparatus for post exposure processing of photoresist wafers | Viachslav Babayan, Douglas A. Buchberger, Jr., Qiwei Liang, Ludovic Godet, Daniel J. Woodruff +2 more | 2021-09-07 |
| 11110383 | Gas abatement apparatus | Adib Khan, Qiwei Liang, Sultan Malik, Rafika Smati, Joseph Ng +1 more | 2021-09-07 |
| 11094573 | Method and apparatus for thin wafer carrier | Jingyu Qiao, Qiwei Liang, Viachslav Babayan, Seshadri Ramaswami | 2021-08-17 |
| 11066747 | Chemical delivery chamber for self-assembled monolayer processes | Qiwei Liang, Adib Khan, Tobin Kaufman-Osborn, Ludovic Godet | 2021-07-20 |
| 11049537 | Additive patterning of semiconductor film stacks | John O. Dukovic, Ellie Yieh, Praburam Gopalraja, Steven Hiloong WELCH, Bhargav S. Citla | 2021-06-29 |
| 11003080 | Process chamber for field guided exposure and method for implementing the process chamber | Kartik Ramaswamy | 2021-05-11 |
| 10998200 | High pressure annealing process for metal containing materials | Kaushal K. Singh, Mei-Yee Shek, Ellie Yieh | 2021-05-04 |
| 10964527 | Residual removal | Jong Mun Kim, Biao Liu, Cheng Pan, Erica Chen, Chentsau Ying +1 more | 2021-03-30 |
| 10957518 | Chamber with individually controllable plasma generation regions for a reactor for processing a workpiece | Kartik Ramaswamy, Lawrence Wong, Steven Lane, Yang Yang, Praburam Gopalraja | 2021-03-23 |
| 10954594 | High temperature vapor delivery system and method | Viachslav Babayan, Qiwei Liang, Tobin Kaufman-Osborn, Ludovic Godet | 2021-03-23 |
| 10950429 | Methods of forming amorphous carbon hard mask layers and hard mask layers formed therefrom | Bhargav S. Citla, Mei-Yee Shek | 2021-03-16 |
| 10947621 | Low vapor pressure chemical delivery | Adib Khan, Qiwei Liang, Tobin Kaufman-Osborn | 2021-03-16 |
| 10943779 | Method and system for three-dimensional (3D) structure fill | Ellie Yieh, Ludovic Godet, Er-Xuan Ping, Gary E. Dickerson | 2021-03-09 |
| 10927449 | Extension of PVD chamber with multiple reaction gases, high bias power, and high power impulse source for deposition, implantation, and treatment | Jingjing Liu, Ludovic Godet, Yongmei Chen, Anantha K. Subramani | 2021-02-23 |
| 10923367 | Process chamber for etching low K and other dielectric films | Dmitry Lubomirsky, Ellie Yieh, Sergey G. Belostotskiy | 2021-02-16 |
| 10916505 | Graphene diffusion barrier | Yong Wu, Srinivas Gandikota, Abhijit Basu Mallick | 2021-02-09 |
| 10916433 | Methods of forming metal silicide layers and metal silicide layers formed therefrom | He Ren, Maximillian Clemons, Mei-Yee Shek, Minrui Yu, Bencherki Mebarki +2 more | 2021-02-09 |
| 10916426 | Formation of crystalline, layered transition metal dichalcogenides | Keith Tatseun Wong, Ellie Yieh | 2021-02-09 |
| 10892161 | Enhanced selective deposition process | Biao Liu, Cheng Pan, Erica Chen, Chang Ke, Lei Zhou | 2021-01-12 |