Issued Patents All Time
Showing 51–75 of 150 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11452197 | Shock wave visualization for extreme ultraviolet plasma optimization | Yen-Shuo Su, Jen-Hao Yeh, Jhan-Hong YEH, Ting-Ya CHENG, Yee-Shian Henry TONG +3 more | 2022-09-20 |
| 11419203 | EUV radiation modification methods and systems | Chun-Lin Chang, Jen-Hao Yeh, Tzung-Chi Fu, Bo-Tsun Liu, Li-Jui Chen | 2022-08-16 |
| 11333983 | Light source, EUV lithography system, and method for generating EUV radiation | Chi YANG, Ssu-Yu Chen, Shang-Chieh Chien, Chieh Hsieh, Tzung-Chi Fu +2 more | 2022-05-17 |
| 11320733 | Reticle with conductive material structure | Hsiao-Lun Chang, Chueh-Chi Kuo, Tsung-Yen Lee, Tzung-Chi Fu, Li-Jui Chen +1 more | 2022-05-03 |
| 11294293 | Overlay marks for reducing effect of bottom layer asymmetry | Hung-Chih Hsieh, Kai-Hsiung Chen | 2022-04-05 |
| 11275318 | Radiation source for lithography process | Shang-Ying WU, Shang-Chieh Chien, Bo-Tsun Liu, Li-Jui Chen | 2022-03-15 |
| 11269257 | Apparatus and method for generating extreme ultraviolet radiation | Chieh Hsieh, Kuan-Hung Chen, Chun-Chia Hsu, Shang-Chieh Chien, Bo-Tsun Liu +1 more | 2022-03-08 |
| 11272606 | EUV light source and apparatus for lithography | Shang-Chieh Chien, Chia-Chen Chen, Jen-Yang Chung, Li-Jui Chen, Tzung-Chi Fu +1 more | 2022-03-08 |
| 11237482 | Process system and operating method thereof | Chao-Chen Chang, Shao-Wei Luo, Jen-Yang Chung, Shang-Chieh Chien, Li-Jui Chen | 2022-02-01 |
| 11224115 | System and method for extreme ultraviolet source control | Chun-Chia Hsu, Chieh Hsieh, Shang-Chieh Chien, Li-Jui Chen, Tzung-Chi Fu +1 more | 2022-01-11 |
| 11221562 | Reticle and method of detecting intactness of reticle stage using the same | Chia-Yu Lee, Tao Chen, Ching-Juinn Huang | 2022-01-11 |
| 11219115 | EUV collector contamination prevention | Ming-Fa Wu, Tzung-Chi Fu, Chun Che Lin, Huai-Tei Yang | 2022-01-04 |
| 11204556 | Apparatus and method for monitoring reflectivity of the collector for extreme ultraviolet radiation source | Yu-Chih Huang, Chi-Ming Yang, Che-Chang Hsu, Li-Jui Chen | 2021-12-21 |
| 11172566 | Droplet generator, EUV lithography device and method of generating a series of droplets using a droplet generator | Jen-Hung Hsiao, Li-Jui Chen, Shang-Chieh Chien | 2021-11-09 |
| 11166361 | Method and device for measuring contamination in EUV source | Kuan-Hung Chen, Shang-Chieh Chien, Li-Jui Chen | 2021-11-02 |
| 11158989 | Laser source device, extreme ultraviolet lithography device and method | Henry Yee Shian Tong, Wen-Chih Wang, Hsin-Liang Chen, Louis Chun-Lin Chang, Cheng-Chieh Chen +2 more | 2021-10-26 |
| 11153959 | Apparatus and method for generating extreme ultraviolet radiation | Chun-Chia Hsu, Li-Jui Chen, Shang-Chieh Chien, Yen-Shuo Su, Chieh Hsieh +1 more | 2021-10-19 |
| 11153958 | Extreme ultraviolet photolithography method | Ming-Hsun Tsai, Han-Lung Chang, Yen-Hsun Chen, Shao-Hua Wang, Li-Jui Chen | 2021-10-19 |
| 11150561 | Method and apparatus for collecting information used in image-error compensation | Hung-Wen Cho, Fu-Jye Liang, Chun-Kuang Chen, Chih-Tsung Shih, Li-Jui Chen +1 more | 2021-10-19 |
| 11134558 | Droplet generator assembly and method for using the same and radiation source apparatus | Shih-Yu Tu, Yu-Kuang SUN, Shao-Hua Wang, Han-Lung Chang, Hsiao-Lun Chang +6 more | 2021-09-28 |
| 11121018 | Method and apparatus for lithography in semiconductor fabrication | Chueh-Chi Kuo, Tsung-Yen Lee, Chia-Hsin CHOU, Tzung-Chi Fu, Li-Jui Chen +1 more | 2021-09-14 |
| 11106146 | Lithography system and method | Hao-Yu Lan, Ching-Juinn Huang, Tzung-Chi Fu, Tsung-Yen Lee | 2021-08-31 |
| 11092555 | EUV vessel inspection method and related system | Chun-Lin Chang, Shang-Chieh Chien, Shang-Ying WU, Li-Kai Cheng, Tzung-Chi Fu +4 more | 2021-08-17 |
| 11086237 | Extreme ultraviolet lithography system | Ssu-Yu Chen, Li-Jui Chen, Che-Chang Hsu, Chi-Ming Yang | 2021-08-10 |
| 11086225 | Lithography system and method thereof | Wei-Shin Cheng, Hsin-Feng Chen, Cheng-Hao LAI, Shao-Hua Wang, Han-Lung Chang +1 more | 2021-08-10 |