Issued Patents All Time
Showing 76–100 of 150 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11086209 | EUV lithography mask with a porous reflective multilayer structure | Chih-Tsung Shih, Shih-Chang Shih, Li-Jui Chen | 2021-08-10 |
| 11067906 | Droplet catcher system of EUV lithography apparatus and EUV lithography apparatus maintenance method | Shih-Yu Tu, Hsiao-Lun Chang, Li-Jui Chen, Han-Lung Chang | 2021-07-20 |
| 11071191 | Extreme ultraviolet radiation source and cleaning method thereof | Chi YANG, Sheng-Ta Lin, Shang-Chieh Chien, Li-Jui Chen | 2021-07-20 |
| 11062898 | Particle removal apparatus, particle removal system and particle removal method | Siao-Chian Huang, Ching-Juinn Huang, Tzung-Chi Fu, Tsung-Yen Lee | 2021-07-13 |
| 11032897 | Refill and replacement method for droplet generator | Shih-Yu Tu, Han-Lung Chang, Hsiao-Lun Chang, Li-Jui Chen | 2021-06-08 |
| 11029324 | Particle image velocimetry of extreme ultraviolet lithography systems | En Hao Lai, Chi-Ming Yang, Shang-Chieh Chien, Li-Jui Chen | 2021-06-08 |
| 11024623 | Layout modification method for exposure manufacturing process | Hung-Wen Cho, Fu-Jye Liang, Chun-Kuang Chen, Chih-Tsung Shih, Li-Jui Chen +1 more | 2021-06-01 |
| 11013097 | Apparatus and method for generating extreme ultraviolet radiation | Wei-Chih Lai, Han-Lung Chang, Chi-Ming Yang, Shang-Chieh Chien, Bo-Tsun Liu +1 more | 2021-05-18 |
| 10997706 | Reticle backside inspection method | Zi-Wen Chen, Chih-Tsung Shih, Li-Jui Chen, Shih-Chang Shih | 2021-05-04 |
| 10993308 | Light source for lithography exposure process | Chieh Hsieh, Shang-Chieh Chien, Chun-Chia Hsu, Bo-Tsun Liu, Tzung-Chi Fu +1 more | 2021-04-27 |
| 10990026 | Lithography apparatus and cleaning method thereof | Chi-Ming Yang, Sheng-Ta Lin, Shang-Chieh Chien, Li-Jui Chen | 2021-04-27 |
| 10980100 | Residual gain monitoring and reduction for EUV drive laser | Chun-Lin Chang, Jen-Hao Yeh, Han-Lung Chang, Tzung-Chi Fu, Bo-Tsun Liu +1 more | 2021-04-13 |
| 10969690 | Extreme ultraviolet control system for adjusting droplet illumination parameters | Jen-Yang Chung, Chieh Hsieh, Shang-Chieh Chien, Li-Jui Chen | 2021-04-06 |
| 10962881 | Method and apparatus for lithography in semiconductor fabrication | Cheng-Kuan Wu, Li-Jui Chen, Chih-Tsung Shih | 2021-03-30 |
| 10955762 | Radiation source apparatus and method for decreasing debris in radiation source apparatus | Chi YANG, Ssu-Yu Chen, Shang-Chieh Chien, Chieh Hsieh, Tzung-Chi Fu +2 more | 2021-03-23 |
| 10955752 | EUV radiation source apparatus for lithography | Yu-Chih Chen, Li-Jui Chen, Shang-Chieh Chien, Sheng-Kang Yu, Wei-Chun Yen | 2021-03-23 |
| 10955750 | Lithography system and method thereof | Wei-Chun Yen, Chi-Ming Yang, Shang-Chieh Chien, Li-Jui Chen | 2021-03-23 |
| 10928741 | Radiation source for lithography process | Shang-Ying WU, Shang-Chieh Chien, Bo-Tsun Liu, Li-Jui Chen | 2021-02-23 |
| 10925142 | EUV radiation source for lithography exposure process | Chun-Chia Hsu, Kuan-Hung Chen, Shang-Chieh Chien, Li-Jui Chen | 2021-02-16 |
| 10917959 | EUV radiation modification methods and systems | Chun-Lin Chang, Jen-Hao Yeh, Tzung-Chi Fu, Bo-Tsun Liu, Li-Jui Chen | 2021-02-09 |
| 10880981 | Collector pellicle | Shang-Chieh Chien, Chi-Ming Yang, Jen-Yang Chung, Shao-Wei Luo, Tzung-Chi Fu +2 more | 2020-12-29 |
| 10880980 | EUV light source and apparatus for EUV lithography | Wei-Shin Cheng, Han-Lung Chang, Li-Jui Chen, Hsiao-Lun Chang | 2020-12-29 |
| 10877378 | Vessel for extreme ultraviolet radiation source | Ssu-Yu Chen, Che-Chang Hsu, Chi-Ming Yang, Shang-Chieh Chien, Li-Jui Chen | 2020-12-29 |
| 10877190 | Extreme ultraviolet radiation source | Chi-Ming Yang, Sheng-Ta Lin, Jen-Yang Chung, Shang-Chieh Chien, Li-Jui Chen | 2020-12-29 |
| 10875060 | Method and apparatus for removing debris from collector | Shang-Ying WU, Ming-Hsun Tsai, Sheng-Kang Yu, Yung-Teng Yu, Chi-Ming Yang +3 more | 2020-12-29 |