Issued Patents All Time
Showing 26–50 of 93 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9287082 | Charged particle beam apparatus | Kenichi Morita, Sayaka Tanimoto, Makoto Sakakibara, Naomasa Suzuki, Kenji Obara | 2016-03-15 |
| 9230775 | Charged particle instrument | Takeyoshi Ohashi, Yasunari Sohda, Makoto Ezumi, Noritsugu Takahashi | 2016-01-05 |
| 9159533 | Charged particle beam apparatus permitting high-resolution and high-contrast observation | Naomasa Suzuki, Tomoyasu Shojo, Noritsugu Takahashi | 2015-10-13 |
| 9129775 | Specimen potential measuring method, and charged particle beam device | Tatsuaki Ishijima, Osamu Nasu, Takeyoshi Ohashi, Hiromasa Yamanashi, Takuji Miyamoto +1 more | 2015-09-08 |
| 9123501 | Device for correcting diffraction aberration of electron beam | Yoichi Ose, Mitsugu Sato, Hiroyuki Ito, Hiroshi Suzuki, Naomasa Suzuki | 2015-09-01 |
| 8859962 | Charged-particle microscope | Noritsugu Takahashi, Manabu Yano, Hirohiko Kitsuki, Kazunari Asao, Tomoyasu Shojo | 2014-10-14 |
| 8841612 | Charged particle beam microscope | Naomasa Suzuki, Tomoyasu Shojo, Noritsugu Takahashi, Hiroshi Suzuki, Hiroshi Makino | 2014-09-23 |
| 8816277 | Pattern evaluation method, device therefor, and electron beam device | Hiromasa Yamanashi, Yasunari Sohda, Takeyoshi Ohashi | 2014-08-26 |
| 8796651 | Method and apparatus for specimen fabrication | Hiroyasu Shichi, Tohru Ishitani, Hidemi Koike, Kaoru Umemura, Eiichi Seya +3 more | 2014-08-05 |
| 8785890 | Charged particle beam apparatus permitting high-resolution and high-contrast observation | Naomasa Suzuki, Tomoyasu Shojo, Noritsugu Takahashi | 2014-07-22 |
| 8766183 | Charged particle beam device | Hiromasa Yamanashi, Yasunari Sohda | 2014-07-01 |
| 8735814 | Electron beam device | Yasunari Sohda, Takeyoshi Ohashi, Tasuku Yano, Noritsugu Takahashi | 2014-05-27 |
| 8704175 | Scanning electron microscope | Yasunari Sohda, Hiromasa Yamanashi, Takeyoshi Ohashi, Osamu Komuro | 2014-04-22 |
| 8618520 | Method and apparatus for processing a micro sample | Mitsuo Tokuda, Yasuhiro Mitsui, Hidemi Koike, Satoshi Tomimatsu, Hiroyasu Shichi +2 more | 2013-12-31 |
| 8575547 | Electron beam measurement apparatus | Yasunari Sohda, Shoji Hotta, Shinji Okazaki | 2013-11-05 |
| 8478021 | Charged beam device | Kaori Shirahata, Yoshinori Nakayama, Keiichiro Hitomi, Yasunari Sohda | 2013-07-02 |
| 8467595 | Defect review system and method, and program | Noritsugu Takahashi, Tomoyasu Shojo, Naomasa Suzuki, Kenji Obara | 2013-06-18 |
| 8431915 | Charged particle beam apparatus permitting high resolution and high-contrast observation | Naomasa Suzuki, Tomoyasu Shojo, Noritsugu Takahashi | 2013-04-30 |
| 8431893 | Electron beam apparatus and electron beam inspection method | Tomoyasu Shojo, Mitsugu Sato, Atsuko Fukada, Naomasa Suzuki, Ichiro Tachibana | 2013-04-30 |
| 8405026 | Charged particle beam apparatus | Tomoyasu Shojo, Naomasa Suzuki, Noritsugu Takahashi | 2013-03-26 |
| 8389935 | Charged particle beam apparatus permitting high-resolution and high-contrast observation | Naomasa Suzuki, Tomoyasu Shojo, Noritsugu Takahashi | 2013-03-05 |
| 8222618 | Method and apparatus for processing a microsample | Mitsuo Tokuda, Yasuhiro Mitsui, Hidemi Koike, Satoshi Tomimatsu, Hiroyasu Shichi +2 more | 2012-07-17 |
| 8207498 | Electron beam apparatus and electron beam inspection method | Tomoyasu Shojo, Mitsugu Sato, Atsuko Fukada, Naomasa Suzuki, Ichiro Tachibana | 2012-06-26 |
| 8153969 | Inspection method and inspection system using charged particle beam | Atsuko Fukada, Mitsugu Sato, Naomasa Suzuki, Hidetoshi Nishiyama, Noritsugu Takahashi | 2012-04-10 |
| 8026482 | Charged particle beam apparatus and control method therefor | Hiromasa Yamanashi, Sayaka Tanimoto, Yasunari Souda, Osamu Nasu | 2011-09-27 |