Issued Patents All Time
Showing 51–75 of 93 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8026481 | Charged particle apparatus, scanning electron microscope, and sample inspection method | Tomoyasu Shojo, Atsuko Fukada, Noritsugu Takahashi | 2011-09-27 |
| 7989782 | Apparatus and method for specimen fabrication | Satoshi Tomimatsu, Miyuki Takahashi, Hiroyasu Shichi | 2011-08-02 |
| 7956324 | Charged particle beam apparatus for forming a specimen image | Noritsugu Takahashi, Hideo Todokoro, Mitsugu Sato | 2011-06-07 |
| 7952083 | Ion beam system and machining method | Hiroyasu Shichi, Yoshinori Nakayama, Masaki Hasegawa, Satoshi Tomimatsu | 2011-05-31 |
| 7897936 | Method and apparatus for specimen fabrication | Hiroyasu Shichi, Tohru Ishitani, Hidemi Koike, Kaoru Umemura, Eiichi Seya +3 more | 2011-03-01 |
| 7888639 | Method and apparatus for processing a micro sample | Mitsuo Tokuda, Yasuhiro Mitsui, Hidemi Koike, Satoshi Tomimatsu, Hiroyasu Shichi +2 more | 2011-02-15 |
| 7884325 | Electron beam measurement apparatus | Yasunari Sohda, Shoji Hotta, Shinji Okazaki | 2011-02-08 |
| 7875849 | Electron beam apparatus and electron beam inspection method | Tomoyasu Shojo, Mitsugu Sato, Atsuko Fukada, Naomasa Suzuki, Ichiro Tachibana | 2011-01-25 |
| 7847249 | Charged particle beam apparatus | Noritsugu Takahashi, Hiroyuki Ito, Atsuko Fukada, Masashi Sakamoto, Satoshi Takada | 2010-12-07 |
| 7725278 | Method for failure analysis and system for failure analysis | Satoshi Tomimatsu, Hiroyasu Shichi, Kaoru Umemura | 2010-05-25 |
| 7709062 | Refilling method by ion beam, instrument for fabrication and observation by ion beam, and manufacturing method of electronic device | Hiroyasu Shichi, Isamu Sekihara, Satoshi Tomimatsu, Kaoru Umemura | 2010-05-04 |
| 7679056 | Metrology system of fine pattern for process control by charged particle beam | Hiromasa Yamanashi, Sayaka Tanimoto, Yasunari Sohda | 2010-03-16 |
| 7667212 | Method for depositing a film using a charged particle beam, method for performing selective etching using the same, and charged particle beam equipment therefor | Hiroyasu Shichi | 2010-02-23 |
| 7655907 | Charged particle beam apparatus and pattern measuring method | Sayaka Tanimoto, Hiromasa Yamanashi, Yasunari Sohda | 2010-02-02 |
| 7557347 | Charged particle beam apparatus, scanning electron microscope, and sample observation method using the same | Tomoyasu Shojo, Naomasa Suzuki | 2009-07-07 |
| 7550750 | Method and apparatus for processing a micro sample | Mitsuo Tokuda, Yasuhiro Mitsui, Hidemi Koike, Satoshi Tomimatsu, Hiroyasu Shichi +2 more | 2009-06-23 |
| 7504626 | Scanning electron microscope and apparatus for detecting defect | Ichiro Tachibana, Mitsugu Sato, Atsuko Fukada, Naomasa Suzuki | 2009-03-17 |
| 7482603 | Apparatus and method for specimen fabrication | Satoshi Tomimatsu, Miyuki Takahashi, Hiroyasu Shichi | 2009-01-27 |
| 7470918 | Method and apparatus for processing a micro sample | Mitsuo Tokuda, Yasuhiro Mitsui, Hidemi Koike, Satoshi Tomimatsu, Hiroyasu Shichi +2 more | 2008-12-30 |
| 7465945 | Method and apparatus for processing a micro sample | Mitsuo Tokuda, Yasuhiro Mitsui, Hidemi Koike, Satoshi Tomimatsu, Hiroyasu Shichi +2 more | 2008-12-16 |
| 7462828 | Inspection method and inspection system using charged particle beam | Atsuko Fukada, Mitsugu Sato, Naomasa Suzuki, Hidetoshi Nishiyama, Noritsugu Takahashi | 2008-12-09 |
| 7453072 | Method for depositing a film using a charged particle beam, method for performing selective etching using the same, and charged particle beam equipment therefor | Hiroyasu Shichi | 2008-11-18 |
| 7449690 | Inspection method and inspection apparatus using charged particle beam | Hidetoshi Nishiyama, Noritsugu Takahashi, Mitsugu Sato, Atsuko Fukada, Naomasa Suzuki | 2008-11-11 |
| 7372050 | Method of preventing charging, and apparatus for charged particle beam using the same | Hiroyasu Shichi, Satoshi Tomimatsu | 2008-05-13 |
| 7368729 | Method, apparatus and system for specimen fabrication by using an ion beam | Hiroyasu Shichi, Kaoru Umemura | 2008-05-06 |