MF

Muneyuki Fukuda

HH Hitachi High-Technologies: 72 patents #11 of 1,917Top 1%
HI Hitachi: 21 patents #1,645 of 28,497Top 6%
Overall (All Time): #16,776 of 4,157,543Top 1%
93
Patents All Time

Issued Patents All Time

Showing 76–93 of 93 patents

Patent #TitleCo-InventorsDate
7326942 Ion beam system and machining method Hiroyasu Shichi, Yoshinori Nakayama, Masaki Hasegawa, Satoshi Tomimatsu 2008-02-05
7268356 Method and apparatus for specimen fabrication Hiroyasu Shichi, Tohru Ishitani, Hidemi Koike, Kaoru Umemura, Eiichi Seya +3 more 2007-09-11
7242013 Method for depositing a film using a charged particle beam, method for performing selective etching using the same, and charged particle beam equipment therefor Hiroyasu Shichi 2007-07-10
7205560 Method and apparatus for processing a micro sample Mitsuo Tokuda, Yasuhiro Mitsui, Hidemi Koike, Satoshi Tomimatsu, Hiroyasu Shichi +2 more 2007-04-17
7205554 Method and apparatus for processing a micro sample Mitsuo Tokuda, Yasuhiro Mitsui, Hidemi Koike, Satoshi Tomimatsu, Hiroyasu Shichi +2 more 2007-04-17
7200506 Method for failure analysis and system for failure analysis Satoshi Tomimatsu, Hiroyasu Shichi, Kaoru Umemura 2007-04-03
7095021 Method, apparatus and system for specimen fabrication by using an ion beam Hiroyasu Shichi, Kaoru Umemura 2006-08-22
6977376 Method of prevention charging, and apparatus for charged particle beam using the same Hiroyasu Shichi, Satoshi Tomimatsu 2005-12-20
6927391 Method and apparatus for processing a micro sample Mitsuo Tokuda, Yasuhiro Mitsui, Hidemi Koike, Satoshi Tomimatsu, Hiroyasu Shichi +2 more 2005-08-09
6894287 Microfabrication apparatus and microfabrication method Satoshi Tomimatsu, Hiroyasu Shichi, Osamu Watanabe 2005-05-17
6858851 Apparatus for specimen fabrication and method for specimen fabrication Satoshi Tomimatsu, Hiroyasu Shichi 2005-02-22
6838667 Method and apparatus for charged particle beam microscopy Ruriko Tsuneta, Masanari Koguchi, Mari Nozoe, Mitsugu Sato 2005-01-04
6794663 Method and apparatus for specimen fabrication Hiroyasu Shichi, Tohru Ishitani, Hidemi Koike, Kaoru Umemura, Eiichi Seya +3 more 2004-09-21
6781125 Method and apparatus for processing a micro sample Mitsuo Tokuda, Yasuhiro Mitsui, Hidemi Koike, Satoshi Tomimatsu, Hiroyasu Shichi +2 more 2004-08-24
6774363 Method of preventing charging, and apparatus for charged particle beam using the same Hiroyasu Shichi, Satoshi Tomimatsu 2004-08-10
6717156 Beam as well as method and equipment for specimen fabrication Masakazu Sugaya, Hiroyasu Shichi, Kaoru Umemura, Hidemi Koike 2004-04-06
6664552 Method and apparatus for specimen fabrication Hiroyasu Shichi, Tohru Ishitani, Hidemi Koike, Kaoru Umemura, Eiichi Seya +3 more 2003-12-16
6627889 Apparatus and method for observing sample using electron beam Isao Ochiai, Hidemi Koike, Satoshi Tomimatsu, Mitsugu Sato, Tohru Ishitani 2003-09-30