Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9362088 | Charged particle beam device and sample preparation method | Takahiro Sato, Akinari Morikawa | 2016-06-07 |
| 9330883 | Charged particle beam device | Terutaka Nanri, Satoshi Tomimatsu | 2016-05-03 |
| 8912487 | Charged particle beam device, position specification method used for charged particle beam device, and program | Kunio Sakamoto, Megumi Aizawa, Satoshi Tomimatsu | 2014-12-16 |
| 8552397 | Focused ion beam device and focused ion beam processing method | Yuichi Madokoro, Hirokazu Kaneoya, Tsuyoshi Onishi | 2013-10-08 |
| 8455824 | Charged particle beam apparatus, and sample processing and observation method | Hiroyuki Muto, Tsuyoshi Ohnishi | 2013-06-04 |
| 7989766 | Sample inspection apparatus | Yasuhiko Nara, Tohru Ando, Masahiro Sasajima, Tsutomu Saito, Tomoharu Obuki | 2011-08-02 |
| 7709062 | Refilling method by ion beam, instrument for fabrication and observation by ion beam, and manufacturing method of electronic device | Hiroyasu Shichi, Muneyuki Fukuda, Satoshi Tomimatsu, Kaoru Umemura | 2010-05-04 |
| 7301146 | Probe driving method, and probe apparatus | Satoshi Tomimatsu, Hidemi Koike, Junzo Azuma, Tohru Ishitani, Aritoshi Sugimoto +2 more | 2007-11-27 |
| 6970004 | Apparatus for inspecting defects of devices and method of inspecting defects | Tohru Ishitani, Hidemi Koike, Aritoshi Sugimoto, Kaoru Umemura, Satoshi Tomimatsu +1 more | 2005-11-29 |
| 6960765 | Probe driving method, and probe apparatus | Satoshi Tomimatsu, Hidemi Koike, Junzo Azuma, Tohru Ishitani, Aritoshi Sugimoto +2 more | 2005-11-01 |
| 6734687 | Apparatus for detecting defect in device and method of detecting defect | Tohru Ishitani, Hidemi Koike, Aritoshi Sugimoto, Kaoru Umemura, Satoshi Tomimatsu +1 more | 2004-05-11 |