| 9632425 |
Lithographic apparatus, a dryer and a method of removing liquid from a surface |
Martinus Hendrikus Antonius Leenders, Harry Sewell, Louis John Markoya, Marcus Martinus Petrus Adrianus Vermeulen, Diane McCafferty |
2017-04-25 |
| 9623436 |
Active drying station and method to remove immersion liquid using gas flow supply with gas outlet between two gas inlets |
Bob Streefkerk, Erik Roelof Loopstra, Johannes Catharinus Hubertus Mulkens |
2017-04-18 |
| 9618859 |
Lithographic apparatus and device manufacturing method |
Adrianus Hendrik Koevoets, Jan Bernard Plechelmus Van Schoot, Koen Jacobus Johannes Maria Zaal, Theodorus Petrus Maria Cadee |
2017-04-11 |
| 9606449 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Martinus Hendrikus Antonius Leenders, Jeroen Johannes Sophia Maria Mertens +1 more |
2017-03-28 |
| 9594308 |
Lithographic apparatus and device manufacturing method |
Timotheus Franciscus Sengers, Hans Jansen, Arjen Boogaard |
2017-03-14 |
| 9588442 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Antonius Theodorus Anna Maria Derksen, Joeri Lof, Erik Roelof Loopstra, Johannes Catharinus Hubertus Mulkens +4 more |
2017-03-07 |
| 9581914 |
Lithographic apparatus and device manufacturing method |
Marcel Mathijs Theodore Marie Dierichs, Johannes Henricus Wilhelmus Jacobs, Hans Jansen, Erik Roelof Loopstra, Jeroen Johannes Sophia Maria Mertens +4 more |
2017-02-28 |
| 9568840 |
Lithographic apparatus and device manufacturing method |
Aleksey Yurievich Kolesnychenko, Johannes Jacobus Matheus Baselmans, Christiaan Alexander Hoogendam, Hans Jansen, Jeroen Johannes Sophia Maria Mertens +5 more |
2017-02-14 |
| 9541843 |
Lithographic apparatus and device manufacturing method involving a sensor detecting a radiation beam through liquid |
Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more |
2017-01-10 |
| 9507275 |
Support apparatus, lithographic apparatus and device manufacturing method |
Raymond Wilhelmus Louis Lafarre, Adrianus Hendrik Koevoets, Menno Fien, Antonius Franciscus Johannes De Groot, Christiaan Alexander Hoogendam +6 more |
2016-11-29 |
| 9507278 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Nicolaas Ten Kate +12 more |
2016-11-29 |
| 9507274 |
Substrate holder and method of manufacturing a substrate holder |
Raymond Wilhelmus Louis Lafarre, Nicolaas Ten Kate, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Elisabeth Corinne Rodenburg |
2016-11-29 |
| 9488923 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Nicolaas Ten Kate +8 more |
2016-11-08 |
| 9482966 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Christiaan Alexander Hoogendam, Erik Roelof Loopstra, Hendricus Johannes Maria Meijer +8 more |
2016-11-01 |
| 9477160 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam +11 more |
2016-10-25 |
| 9477153 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Hans Jansen, Martinus Hendrikus Antonius Leenders +4 more |
2016-10-25 |
| 9448494 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Christiaan Alexander Hoogendam, Nicolaas Ten Kate, Sergei Shulepov |
2016-09-20 |
| 9442395 |
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder |
Raymond Wilhelmus Louis Lafarre, Nicolaas Ten Kate, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Elisabeth Corinne Rodenburg |
2016-09-13 |
| 9436097 |
Lithographic apparatus and device manufacturing method |
Jeroen Johannes Sophia Maria Mertens, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Antonius Johannus Van Der Net, Franciscus Johannes Herman Maria Teunissen +4 more |
2016-09-06 |
| 9429853 |
Lithographic apparatus and device manufacturing method |
Marcel Beckers, Christiaan Alexander Hoogendam, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Nicolaas Rudolf Kemper +2 more |
2016-08-30 |
| 9383654 |
Fluid handling structure, lithographic apparatus and device manufacturing method |
Daniel Jozef Maria Direcks, Nicolaas Rudolf Kemper, Danny Maria Hubertus Philips, Michel Riepen, Clemens Johannes Gerardus Van Den Dungen +2 more |
2016-07-05 |
| 9366972 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra, Hendricus Johannes Maria Meijer +9 more |
2016-06-14 |
| 9360765 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Antonius Theodorus Anna Maria Derksen, Joeri Lof, Erik Roelof Loopstra, Johannes Catharinus Hubertus Mulkens +4 more |
2016-06-07 |
| 9285686 |
Lithographic apparatus involving an immersion liquid supply system with an aperture |
Jeroen Johannes Sophia Maria Mertens, Christiaan Alexander Hoogendam, Hans Jansen, Patricius Aloysius Jacobus Tinnemans, Leon Joseph Maria Van Den Schoor +1 more |
2016-03-15 |
| 9280063 |
Substrate table assembly, an immersion lithographic apparatus and a device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Johannes Henricus Wilhelmus Jacobs, Martijn Houben, Thibault Simon Mathieu Laurent, Frank Johannes Jacobus Van Boxtel +1 more |
2016-03-08 |