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Lithographic apparatus and device manufacturing method |
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2019-02-19 |
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Lithographic apparatus and device manufacturing method |
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Lithographic apparatus, a dryer and a method of removing liquid from a surface |
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2019-01-22 |
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Lithographic apparatus and device manufacturing method |
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2019-01-15 |
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Lithographic apparatus and device manufacturing method |
Timotheus Franciscus Sengers, Hans Jansen, Arjen Boogaard |
2018-12-04 |
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2018-11-06 |
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Thermal conditioning method |
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2018-10-09 |
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Lithographic apparatus and device manufacturing method |
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2018-07-17 |
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Lithographic apparatus and device manufacturing method |
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2018-06-05 |
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Radiation collector, radiation source and lithographic apparatus |
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2018-05-29 |
| 9952515 |
Lithographic apparatus and device manufacturing method |
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2018-04-24 |
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Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Martinus Hendrikus Antonius Leenders |
2018-04-24 |
| 9904185 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Nicolaas Ten Kate +12 more |
2018-02-27 |
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Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Antonius Theodorus Anna Maria Derksen, Joeri Lof, Erik Roelof Loopstra, Johannes Catharinus Hubertus Mulkens +4 more |
2018-02-06 |
| 9857695 |
Lithographic apparatus and device manufacturing method |
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2018-01-02 |
| 9829799 |
Lithographic apparatus and device manufacturing method |
Aleksey Yurievich Kolesnychenko, Johannes Jacobus Matheus Baselmans, Christiaan Alexander Hoogendam, Hans Jansen, Jeroen Johannes Sophia Maria Mertens +5 more |
2017-11-28 |
| 9804509 |
Lithographic apparatus and device manufacturing method |
Timotheus Franciscus Sengers, Hans Jansen, Arjen Boogaard |
2017-10-31 |
| 9798246 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam +11 more |
2017-10-24 |
| 9766556 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Christiaan Alexander Hoogendam, Nicolaas Ten Kate, Sergei Shulepov |
2017-09-19 |
| 9753380 |
Lithographic apparatus and device manufacturing method |
Jeroen Johannes Sophia Maria Mertens, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Antonius Johannus Van Der Net, Franciscus Johannes Herman Maria Teunissen +4 more |
2017-09-05 |
| 9746788 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Nicolaas Ten Kate +8 more |
2017-08-29 |
| 9740107 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra, Hendricus Johannes Maria Meijer +9 more |
2017-08-22 |
| 9737934 |
Substrate holder and method of manufacturing a substrate holder |
Raymond Wilhelmus Louis Lafarre, Nicolaas Ten Kate, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Elisabeth Corinne Rodenburg |
2017-08-22 |
| 9703210 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Johannes Jacobus Matheus Baselmans, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens +4 more |
2017-07-11 |
| 9684249 |
Lithographic apparatus with a metrology system for measuring a position of a substrate table |
Adrianus Hendrik Koevoets, Theodorus Petrus Maria Cadee |
2017-06-20 |