| 9235113 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Joost Jeroen Ottens, Edwin Cornelis Kadijk, Sergei Shulepov |
2016-01-12 |
| 9229335 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Martinus Hendrikus Antonius Leenders, Jeroen Johannes Sophia Maria Mertens +1 more |
2016-01-05 |
| 9213247 |
Lithographic apparatus and device manufacturing method |
Timotheus Franciscus Sengers, Hans Jansen, Arjen Boogaard |
2015-12-15 |
| 9207543 |
Lithographic apparatus and device manufacturing method involving a groove to collect liquid |
Aleksey Yurievich Kolesnychenko, Johannes Jacobus Matheus Baselmans, Christiaan Alexander Hoogendam, Hans Jansen, Jeroen Johannes Sophia Maria Mertens +5 more |
2015-12-08 |
| 9152058 |
Lithographic apparatus and device manufacturing method involving a member and a fluid opening |
Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more |
2015-10-06 |
| 9146478 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Martinus Hendrikus Antonius Leenders, Jeroen Johannes Sophia Maria Mertens +1 more |
2015-09-29 |
| 9141003 |
Lithographic apparatus and device manufacturing method |
Ruud Antonius Catharina Maria Beerens, Engelbertus Antonius Fransiscus Van Der Pasch, Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Johannes Petrus Martinus Bernardus Vermeulen |
2015-09-22 |
| 9134622 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Richard Joseph Bruls, Marcel Mathijs Theodore Marie Dierichs, Christiaan Alexander Hoogendam +8 more |
2015-09-15 |
| 9134623 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Richard Joseph Bruls, Marcel Mathijs Theodore Marie Dierichs, Christiaan Alexander Hoogendam +8 more |
2015-09-15 |
| 9104117 |
Lithographic apparatus having a liquid detection system |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens |
2015-08-11 |
| 9099501 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Christiaan Alexander Hoogendam, Nicolaas Ten Kate, Sergei Shulepov |
2015-08-04 |
| 9097987 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Antonius Theodorus Anna Maria Derksen, Joeri Lof, Erik Roelof Loopstra, Johannes Catharinus Hubertus Mulkens +4 more |
2015-08-04 |
| 9097992 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Roelof Frederick De Graaf, Christiaan Alexander Hoogendam, Nicolaas Ten Kate +12 more |
2015-08-04 |
| 9081299 |
Lithographic apparatus and device manufacturing method involving removal of liquid entering a gap |
Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more |
2015-07-14 |
| 9081300 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Martinus Hendrikus Antonius Leenders, Jeroen Johannes Sophia Maria Mertens +1 more |
2015-07-14 |
| 9057967 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra, Hendricus Johannes Maria Meijer +9 more |
2015-06-16 |
| 9025127 |
Lithographic apparatus and device manufacturing method |
Marcel Mathijs Theodore Marie Dierichs, Johannes Henricus Wilhelmus Jacobs, Hans Jansen, Erik Roelof Loopstra, Jeroen Johannes Sophia Maria Mertens +4 more |
2015-05-05 |
| 8988651 |
Lithographic apparatus and device manufacturing method |
Marcel Beckers, Christiaan Alexander Hoogendam, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Nicolaas Rudolf Kemper +2 more |
2015-03-24 |
| 8982316 |
Lithographic apparatus, a metrology apparatus and a method of using the apparatus |
Axel Sebastiaan Lexmond, Johannes Henricus Wilhelmus Jacobs, Leonard Ferdinand Gerard Geers |
2015-03-17 |
| 8976333 |
Lithographic apparatus and lithographic apparatus cooling method |
— |
2015-03-10 |
| 8976334 |
Lithographic apparatus and device manufacturing method |
Marcel Beckers, Christiaan Alexander Hoogendam, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Nicolaas Rudolf Kemper +2 more |
2015-03-10 |
| 8964164 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam +11 more |
2015-02-24 |
| 8953144 |
Lithographic apparatus and device manufacturing method |
Marcel Mathijs Theodore Marie Dierichs, Johannes Henricus Wilhelmus Jacobs, Hans Jansen, Erik Roelof Loopstra, Jeroen Johannes Sophia Maria Mertens +4 more |
2015-02-10 |
| 8953141 |
Immersion lithographic apparatus and device manufacturing method with asymmetric acceleration profile of substrate table to maintain meniscus of immersion liquid |
Martinus Hendrikus Antonius Leenders, Christian Wagner, Rogier Hendrikus Magdalena Cortie |
2015-02-10 |
| 8941811 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Johannes Jacobus Matheus Baselmans, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens +4 more |
2015-01-27 |