| 8937704 |
Lithographic apparatus and device manufacturing method involving a resistivity sensor |
Jeroen Johannes Sophia Maria Mertens, Christiaan Alexander Hoogendam, Hans Jansen, Patricius Aloysius Jacobus Tinnemans, Leon Joseph Maria Van Den Schoor +1 more |
2015-01-20 |
| 8934082 |
Lithographic apparatus and device manufacturing method |
Jeroen Johannes Sophia Maria Mertens, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Antonius Johannus Van Der Net, Franciscus Johannes Herman Maria Teunissen +4 more |
2015-01-13 |
| 8860924 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Hans Jansen, Martinus Hendrikus Antonius Leenders +4 more |
2014-10-14 |
| 8848165 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Martinus Hendrikus Antonius Leenders |
2014-09-30 |
| 8755028 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Nicolaas Ten Kate +8 more |
2014-06-17 |
| 8755033 |
Lithographic apparatus and device manufacturing method involving a barrier to collect liquid |
Aleksey Yurievich Kolesnychenko, Johannes Jacobus Matheus Baselmans, Christiaan Alexander Hoogendam, Hans Jansen, Jeroen Johannes Sophia Maria Mertens +5 more |
2014-06-17 |
| 8755027 |
Lithographic apparatus and device manufacturing method involving fluid mixing and control of the physical property of a fluid |
Matthew Lipson, Marcel Mathijs Theodore Marie Dierichs, Johannes Catharinus Hubertus Mulkens, Bob Streefkerk, Ronald A. Wilklow +1 more |
2014-06-17 |
| 8724084 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam +11 more |
2014-05-13 |
| 8724083 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam +11 more |
2014-05-13 |
| 8711333 |
Lithographic apparatus and device manufacturing method |
Timotheus Franciscus Sengers, Hans Jansen, Arjen Boogaard |
2014-04-29 |
| 8704998 |
Lithographic apparatus and device manufacturing method involving a barrier to collect liquid |
Aleksey Yurievich Kolesnychenko, Johannes Jacobus Matheus Baselmans, Christiaan Alexander Hoogendam, Hans Jansen, Jeroen Johannes Sophia Maria Mertens +5 more |
2014-04-22 |
| 8687168 |
Lithographic apparatus and device manufacturing method |
Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Hans Jansen, Martinus Hendrikus Antonius Leenders, Jeroen Johannes Sophia Maria Mertens +3 more |
2014-04-01 |
| 8681311 |
Lithographic apparatus and device manufacturing method |
Martinus Hendrikus Antonius Leenders, Nicolaas Ten Kate, Michel Riepen, Sergei Shulepov |
2014-03-25 |
| 8638419 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Johannes Jacobus Matheus Baselmans, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens +4 more |
2014-01-28 |
| 8638415 |
Active drying station and method to remove immersion liquid using gas flow supply with gas outlet between two gas inlets |
Bob Streefkerk, Erik Roelof Loopstra, Johannes Catharinus Hubertus Mulkens |
2014-01-28 |
| 8634056 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Richard Joseph Bruls, Marcel Mathijs Theodore Marie Dierichs, Christiaan Alexander Hoogendam +8 more |
2014-01-21 |
| 8629971 |
Lithographic apparatus and device manufacturing method |
Marcel Mathijs Theodore Marie Dierichs, Johannes Henricus Wilhelmus Jacobs, Hans Jansen, Erik Roelof Loopstra, Jeroen Johannes Sophia Maria Mertens +4 more |
2014-01-14 |
| 8610089 |
Thermal conditioning system for thermal conditioning a part of a lithographic apparatus and a thermal conditioning method |
Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors, Martinus Cornelis Maria Verhagen, Olav Waldemar Vladimir Frijns, Gerrit Van Donk +1 more |
2013-12-17 |
| 8564760 |
Lithographic apparatus, device manufacturing method and a control system |
Martinus Hendrikus Antonius Leenders, Nicolaas Rudolf Kemper |
2013-10-22 |
| 8558989 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Hans Butler, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko +12 more |
2013-10-15 |
| 8547519 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Richard Joseph Bruls, Marcel Mathijs Theodore Marie Dierichs, Christiaan Alexander Hoogendam +8 more |
2013-10-01 |
| 8482845 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more |
2013-07-09 |
| 8481978 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Sebastiaan Maria Johannes Cornelissen, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Hernes Jacobs +7 more |
2013-07-09 |
| 8472002 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Hans Butler, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko +12 more |
2013-06-25 |
| 8451422 |
Re-flow and buffer system for immersion lithography |
Harry Sewell, Erik Theodorus Maria Bijlaart, Louis John Markoya, Diane McCafferty, Ralph Joseph Meijers |
2013-05-28 |