| 7929112 |
Lithographic apparatus and device manufacturing method |
Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Hans Jansen, Martinus Hendrikus Antonius Leenders, Jeroen Johannes Sophia Maria Mertens +3 more |
2011-04-19 |
| 7898642 |
Lithographic apparatus and device manufacturing method |
Aleksey Yurievich Kolesnychenko, Johannes Jacobus Matheus Baselmans, Christiaan Alexander Hoogendam, Hans Jansen, Jeroen Johannes Sophia Maria Mertens +5 more |
2011-03-01 |
| 7894040 |
Lithographic apparatus and device manufacturing method |
Matthew Lipson, Marcel Mathijs Theodore Marie Dierichs, Johannes Catharinus Hubertus Mulkens, Bob Streefkerk, Ronald A. Wilklow +1 more |
2011-02-22 |
| 7884919 |
Lithographic apparatus and device manufacturing method |
Peter Paul HEMPENIUS, Marcel Koenraad Marie Baggen, Dirk-Jan Bijvoet, Youssef Karel Maria De Vos |
2011-02-08 |
| 7880860 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Johannes Jacobus Matheus Baselmans, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens +4 more |
2011-02-01 |
| 7839483 |
Lithographic apparatus, device manufacturing method and a control system |
Martinus Hendrikus Antonius Leenders, Nicolaas Rudolf Kemper |
2010-11-23 |
| 7834974 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Christiaan Alexander Hoogendam, Nicolaas Ten Kate, Sergei Shulepov |
2010-11-16 |
| 7834977 |
Lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans, Christiaan Alexander Hoogendam, Hans Jansen, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens +1 more |
2010-11-16 |
| 7812924 |
Lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens, Bob Streefkerk |
2010-10-12 |
| 7808614 |
Lithographic apparatus and device manufacturing method |
Carlo Cornelis Maria Luijten, Nicolaas Rudolf Kemper, Martinus Hendrickus Antonius Leenders, Erik Roelof Loopstra, Bob Streefkerk +3 more |
2010-10-05 |
| 7779781 |
Lithographic apparatus and device manufacturing method |
Jeroen Johannes Sophia Maria Mertens, Christiaan Alexander Hoogendam, Hans Jansen, Patricius Aloysius Jacobus Tinnemans, Leon Joseph Maria Van Den Schoor +1 more |
2010-08-24 |
| 7733459 |
Lithographic apparatus and device manufacturing method |
Marcel Mathijs Theodore Marie Dierichs, Johannes Henricus Wilhelmus Jacobs, Hans Jansen, Erik Roelof Loopstra, Jeroen Johannes Sophia Maria Mertens +4 more |
2010-06-08 |
| RE41307 |
Mask for clamping apparatus, e.g. for a lithographic apparatus |
Tjarko Adriaan Rudolf Van Empel |
2010-05-04 |
| 7705962 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Christiaan Alexander Hoogendam, Nicolaas Ten Kate, Frits Van Der Meulen |
2010-04-27 |
| 7701550 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Nicolaas Ten Kate +8 more |
2010-04-20 |
| 7670730 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens, Christiaan Alexander Hoogendam |
2010-03-02 |
| 7652751 |
Lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans, Christiaan Alexander Hoogendam, Hans Jansen, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens +1 more |
2010-01-26 |
| 7643127 |
Prewetting of substrate before immersion exposure |
Johannes Jacobus Matheus Baselmans, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens, Bob Streefkerk |
2010-01-05 |
| 7633073 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Sebastiaan Maria Johannes Cornelissen, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Hernes Jacobs +7 more |
2009-12-15 |
| 7616383 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Erik Roelof Loopstra, Johannes Catharinus Hubertus Mulkens |
2009-11-10 |
| 7602470 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Roelof Frederik De Graaf, Christian Alexander Hoogendam, Nicolaas Ten Kate +12 more |
2009-10-13 |
| 7593093 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra, Hendricus Johannes Maria Meijer +9 more |
2009-09-22 |
| 7593092 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Hans Butler, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko +12 more |
2009-09-22 |
| 7583357 |
Lithographic apparatus and device manufacturing method |
Patrick Johannes Cornelus Hendrik Smulders, Peter Smits |
2009-09-01 |
| 7557901 |
Lithographic apparatus and device manufacturing method |
Thimotheus Sengers, Hans Jansen, Arjen Boogaard |
2009-07-07 |