| 7078715 |
Lithographic apparatus and apparatus adjustment method |
Jacob Willem Vink, Theodorus Marinus Modderman, Theodorus Petrus Maria Cadee |
2006-07-18 |
| 7075616 |
Lithographic apparatus and device manufacturing method |
Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Joeri Lof, Erik Roelof Loopstra, Jeroen Johannes Sophia Maria Mertens +4 more |
2006-07-11 |
| 7034917 |
Lithographic apparatus, device manufacturing method and device manufactured thereby |
Johannes Jacobus Matheus Baselmans, Jeroen Johannes Sophia Maria Mertens, Christiaan Alexander Hoogendam, Hans Jansen, Johannes Catharinus Hubertus Mulkens +1 more |
2006-04-25 |
| 7016019 |
Lithographic apparatus and device manufacturing method |
Petrus Marinus Christianus Maria Van Den Biggelaar, Henrikus Herman Marie Cox, Yin Tim Tso, Theodorus Knoops |
2006-03-21 |
| 6956222 |
Lithographic apparatus and method of manufacturing a device |
Noud Jan Gilissen, Martinus Hendrikus Antonius Leenders |
2005-10-18 |
| 6856376 |
Lithographic apparatus, apparatus cleaning method, device manufacturing method and device manufactured thereby |
Gert-Jan Heerens, Franciscus Andreas Cornelis Johannes Spanjers, Aschwin Lodewijk Hendricus Johannes Van Meer, Thomas Josephus Maria Castenmiller |
2005-02-15 |
| 6781673 |
Mask handling apparatus, lithographic projection apparatus, device manufacturing method and device manufactured thereby |
Johannes Hubertus Josephina Moors, Vadim Yevgenyevich Banine, Martinus Hendrikus Antonius Leenders, Henri Gerard Cato Werij, Hugo Matthieu Visser +4 more |
2004-08-24 |
| 6480260 |
Mask clamping apparatus, e.g. for a lithographic apparatus |
Tjarko Adriaan Rudolf Van Empel |
2002-11-12 |