| 7528929 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Richard Joseph Bruls, Marcel Mathijs Theodore Marie Dierichs, Christiaan Alexander Hoogendam +8 more |
2009-05-05 |
| 7522261 |
Lithographic apparatus and device manufacturing method |
Carlo Cornelis Maria Luijten, Nicolaas Rudolf Kemper, Martinus Hendrickus Antonius Leenders, Erik Roelof Loopstra, Bob Streefkerk +3 more |
2009-04-21 |
| 7486384 |
Lithographic support structure |
Patricius Aloysius Jacobus Tinnemans, Edwin Johan Buis, Jan Van Elp, Jan Frederik Hoogkamp, Aschwin Lodewijk Hendricus Johannes Van Meer +8 more |
2009-02-03 |
| 7474379 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Martinus Hendrikus Antonius Leenders |
2009-01-06 |
| 7468779 |
Lithographic apparatus and device manufacturing method |
Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Hans Jansen, Martinus Hendrikus Antonius Leenders, Jeroen Johannes Sophia Maria Mertens +3 more |
2008-12-23 |
| 7463330 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens |
2008-12-09 |
| 7459701 |
Stage apparatus, lithographic apparatus and device manufacturing method |
Marcel Koenraad Marie Baggen, Dirk-Jan Bijvoet, Jan Frederik Hoogkamp, Albert Johannes Maria Jansen, Jan Jaap Kuit +4 more |
2008-12-02 |
| 7433016 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Martinus Hendrikus Antonius Leenders, Jeroen Johannes Sophia Maria Mertens +1 more |
2008-10-07 |
| 7411654 |
Lithographic apparatus and device manufacturing method |
Marcel Beckers, Christiaan Alexander Hoogendam, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Nicolaas Rudolf Kemper +2 more |
2008-08-12 |
| 7379155 |
Lithographic apparatus and device manufacturing method |
Jeroen Johannes Sophia Maria Mertens, Roelof Frederick De Graaf, Christiaan Alexander Hoogendam, Antonius Johannus Van Der Net, Franciscus Johaannes Herman Maria Teunissen +4 more |
2008-05-27 |
| 7379159 |
Lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans, Christiaan Alexander Hoogendam, Hans Jansen, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens +1 more |
2008-05-27 |
| 7375796 |
Lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans, Christiaan Alexander Hoogedam, Hans Jansen, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens +1 more |
2008-05-20 |
| 7372541 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +8 more |
2008-05-13 |
| 7352434 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Levinus Pieter Bakker, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen +12 more |
2008-04-01 |
| 7307696 |
Lithographic apparatus and device manufacturing method |
Joost Jeroen Ottens |
2007-12-11 |
| 7248334 |
Sensor shield |
Johannes Jacobus Matheus Baselmans, Christiaan Alexander Hoogendam, Hans Jansen, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens +1 more |
2007-07-24 |
| 7224436 |
Lithographic apparatus and device manufacturing method |
Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Joeri Lof, Erik Roelof Loopstra, Jeroen Johannes Sophia Maria Mertens +4 more |
2007-05-29 |
| 7213963 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more |
2007-05-08 |
| 7199858 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Hans Butler, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko +12 more |
2007-04-03 |
| 7196770 |
Prewetting of substrate before immersion exposure |
Johannes Jacobus Matheus Baselmans, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens, Bob Streefkerk |
2007-03-27 |
| 7184122 |
Lithographic apparatus and device manufacturing method |
Timotheus Franciscus Sengers, Hans Jansen, Arjen Boogaard |
2007-02-27 |
| 7161654 |
Lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens, Bob Streefkerk |
2007-01-09 |
| 7161663 |
Lithographic apparatus |
Jeroen Johannes Sophia Maria Mertens, Christiaan Alexander Hoogendam, Bob Streefkerk |
2007-01-09 |
| 7119874 |
Lithographic apparatus and device manufacturing method |
Henrikus Herman Marie Cox, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra, Helmar Van Santen |
2006-10-10 |
| 7110081 |
Lithographic apparatus and device manufacturing method |
Christian Alexander Hoogendam, Hans Jansen, Jacobus Johannus Leonardus Hendricus Verspay, Antonius Theodorus Anna Maria Derksen, Joeri Lof +4 more |
2006-09-19 |